MEMS variable-capacitor phase shifters part II: Reflection-type phase shifters

A novel design procedure for reflection-type phase shifters using capacitive devices is developed. Using this approach, a phase shifter for operation at 26.5 GHz is developed using MEMS variable capacitors reported in Part I of this article. A design optimization procedure is discussed. Design of a CPW hybrid at 26.5 GHz (as needed for this phase shifter) is also discussed. Experimental results validate the design procedure and yield a phase shift of 179.30° at 26.5 GHz. © 2003 Wiley Periodicals, Inc. Int J RF and Microwave CAE 13: 415–425, 2003.