论文信息 - On the formation of binary compounds in Au/InP system

On the formation of binary compounds in Au/InP system

The formation and identification of binary compounds in Au‐InP system has been reported. The contact reaction was investigated in the temperature range 320–360 °C by the combined use of 2‐MeV He+ ions backscattering spectrometry, x‐ray diffraction, TEM, and SEM. The results give evidence that both In and P form compounds with gold; formation of oxides has not been observed. A model of metallurgical structure of Au/InP contacts annealed at temperatures below or equal to 360 °C has been proposed.

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