论文信息 - Impact of negative oxygen ions on the deposition processes of RF-magnetron sputtered SrTiO3 thin films - 字舞流文

Impact of negative oxygen ions on the deposition processes of RF-magnetron sputtered SrTiO3 thin films

A. Sarkissian | A. Ruediger | Reji Thomas | A. Merlen | F. A. Vargas | F. Ambriz Vargas | A. Hadj Youssef | A. H. Youssef | I. Amaechi | R. Thomas