Improvement of NBTI and electrical characteristics by ozone pre-treatment and PBTI issues in HfAlO(N) high-k gate dielectrics
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Seong-Geon Park | C. Hwang | Jong-Ho Lee | N. Lee | S. Kang | Hong-bae Park | S. Doh | M. Cho | K. Suh | D. Moon | Hyung-Suk Jung | Yun-seok Kim | H. Lim | Jong Pyo Kim | Jung Hyoung Lee | Ho-Kyu Kan | G. Choi | Youngsu Chung | Hion-Suck Baikz | H. Chang | Moonju Cho | H. Jung | Jong-Ho Lee | H. Chang