论文信息 - Large‐scale data principal component analysis of phase transition from a‐Si:H to nc‐Si:H using PECVD optical emission spectra - 字舞流文

Large‐scale data principal component analysis of phase transition from a‐Si:H to nc‐Si:H using PECVD optical emission spectra

Y. Fuh | Tomi T. T. Li | Li-Han Kau | Hung-Jui Huang | Hsueh-Er Chang | Y. Hsieh