Barium titanate thin films prepared on MgO (100) substrates by coating-pyrolysis process

Barium titanate (BaTiO3) thin films were prepared on MgO (100) substrates using metal naphthenate solution by a coating-pyrolysis process. Amorphous films pyrolyzed at 470‡C were crystallized to BaTiO3 phase by heat treatment at higher temperatures. The crystallinity and alignment of the films depended on temperature and on atmosphere during heat treatment. Epitaxial BaTiO3 film having (100)-orientation was obtained by heat treatment at 900‡C under oxygen partial pressure of 2x 10-4 atm. The epitaxial BaTiO3 film had a lattice constant of 0.4016 nm and displayed a smooth surface with some pores dispersed on the surface. By heat treatment in air, amorphous BaTiO3 film was obtained at 900‡C or below, and textured film with less strong (100) orientation was obtained at 1,200‡C and consisted of grains with diameter about 0.3 Μ.

[1]  Y. Shintani,et al.  Preparation of Thin BaTiO3 Films by dc Diode Sputtering , 1970 .

[2]  Ho-Gi Kim,et al.  Effect of chromium in substrate steel on the chemical vapour deposition of TiC , 1987 .

[3]  Y. Kobayashi,et al.  Growth of BaTiO3SrTiO3 thin films by r.f. magnetron sputtering , 1989 .

[4]  K. Iijima,et al.  Preparation of ferroelectric BaTiO3 thin films by activated reactive evaporation , 1990 .

[5]  B. Wessels,et al.  Epitaxial growth of BaTiO3 thin films by organometallic chemical vapor deposition , 1992 .

[6]  John A. Smith,et al.  Effect of growth conditions on the properties and morphology of chemically derived epitaxial thin films of Ba2YCu3O7−x on (001) LaAlO3 , 1992 .

[7]  C. B. Carter,et al.  Pulsed‐Laser Deposition of Barium Titanate Thin Films , 1992 .

[8]  Graham K. Hubler,et al.  Pulsed Laser Deposition , 1992 .

[9]  M. N. Kamalasanan,et al.  Dielectric and ferroelectric properties of BaTiO3 thin films grown by the sol‐gel process , 1993 .

[10]  Roger A. Lessard,et al.  STRUCTURAL AND OPTICAL CHARACTERIZATION OF BATIO3 THIN FILMS PREPARED BY METAL-ORGANIC DEPOSITION FROM BARIUM 2-ETHYLHEXANOATE AND TITANIUM DIMETHOXY DINEODECANOATE , 1994 .

[11]  K. Iijima,et al.  Epitaxial growth and dielectric properties of BaTiO3 films on Pt electrodes by reactive evaporation , 1994 .

[12]  T. Nose,et al.  Dielectric Property of Epitaxial Films of BaTiO3 Synthesized by Laser Ablation , 1994 .

[13]  Ryna B. Marinenko,et al.  Epitaxial growth of BaTiO3 thin films at 600 °C by metalorganic chemical vapor deposition , 1995 .

[14]  D. Clarke,et al.  Crystallographic orientation of epitaxial BaTiO3 films: The role of thermal‐expansion mismatch with the substrate , 1995 .

[15]  H. Kwok,et al.  Pulsed laser deposition of BaTiO3 thin films and their optical properties , 1995 .

[16]  Sang-Sub Kim,et al.  Structural characterization of epitaxial BaTiO3 thin films grown by sputter deposition on MgO(100) , 1995 .

[17]  C. Youn,et al.  Preparation and characterization of TiO2 thin films by PECVD on Si substrate , 1996 .

[18]  I. Yamaguchi,et al.  Preparation of epitaxial BaTiO_3 thin films by the dipping-pyrolysis process , 1997 .

[19]  C. Chung,et al.  Metalorganic chemical vapor deposition of ferroelectric Pb(ZrxTi1- xO3thin films , 1997 .