Influence on the film properties of torch inclination angle in the FHD process

The refractive index and the film thickness were measured by the prism coupler, and GeO2 and P2O5 concentration were analyzed by EPMA (Electron Probe Micro Analysis) according to the torch inclination angle and the distance between torch and substrate. As the torch angle was steeper, the thickness and the GeO2 concentration were increased, and the P2O5 concentration was decreased for the angle greater than 45 degree