论文信息 - FIB Lithography Challenges of Si3N4/GaN Mask Preparation for Selective Epitaxy - 字舞流文

FIB Lithography Challenges of Si3N4/GaN Mask Preparation for Selective Epitaxy

M. N. Mizerov | V. Evtikhiev | G. V. Voznyuk | I. V. Levitskii | M. Mitrofanov | W. Lundin | E. E. Tatarinov | S. Rodin

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