Automated polarimeter–macroscope for optical mapping of birefringence, azimuths, and transmission in large area wafers. Part I. Theory of the measurement

A computer‐controlled polarimeter–macroscope has been developed to measure birefringence (phase retardation), the principal azimuths and transmission in large area (up to 6 in. diameter) wafers. It consists of two HR‐type linear polarizers which can be rotated simultaneously by a stepper motor versus an immobile wafer. The transmission axes of the polarizers can be set at either 90° or 0° (polariscopic mode) or at 45° (polarimetric mode). The ability of observing samples’ images in the polariscopic mode can be useful for, e.g., quick detection of macroscopic defects. In the polarimetric mode the arrangement is capable of collecting input data through a video frame grabber (VFG)/TV camera detecting system and calculate three maps as stated above within a fraction of a minute. In usual circumstances, using a VFG with 256 grey levels enables determination of birefringence with an error not greater than approximately 5×10−7, whereas errors of azimuths and transmission are of a fraction of a degree and of a pe...

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