A piezoelectric micromotor using in-plane shearing of PZT elements

A torsional micromotor, 3/spl times/4/spl times/8.5mm, was developed using planar bulk lead zirconium titantate placed upon a small rectangular prism made from phosphor bronze, with a tapered conical horn and a machined interior. By using a new measurement technique, the torque and efficiency versus speed were measured at several combinations of applied voltage and preload. At 87.1-mN preload, up to 0.1-N/spl middot/mm torque and 425r/min in both directions were obtained by driving the system at resonance, 186.3kHz for counter-clockwise rotation, and 240.6kHz for clockwise rotation, while the overall efficiency peaked at slightly above 40%.

[1]  S. Ueha,et al.  Ultrasonic motors : theory and applications , 1993 .

[2]  M. Kurosawa,et al.  Hybrid transducer type ultrasonic motor , 1991, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[3]  T. Takano,et al.  Some constructions and characteristics of rod-type piezoelectric ultrasonic motors using longitudinal and torsional vibrations , 1992, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[4]  Toshiro Higuchi,et al.  Cylindrical Micro Ultrasonic Motor. , 1994 .

[5]  M. Kurosawa,et al.  A smooth impact rotation motor using a multi-layered torsional piezoelectric actuator , 1999, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[6]  Jiromaru Tsujino,et al.  Ultrasonic motor using a one-dimensional longitudinal-torsional vibration converter with diagonal slits , 1998 .

[7]  W. Soedel.  Vibrations of shells and plates , 1981 .

[8]  Jiromaru Tsujino,et al.  Load characteristics of ultrasonic motor with a longitudinal-torsional converter and various nonlinear springs for inducing static pressure , 2001 .

[9]  H. N. Beveridge,et al.  Piezoelectric Transducers for Ultrasonic Delay Lines , 1952, Proceedings of the IRE.

[10]  M. Aoyagi,et al.  Ultrasonic Motors Using Longitudinal and Bending Multimode Vibrators with Mode Coupling by Externally Additional Asymmetry or Internal Nonlinearity , 1992 .

[11]  M. Kurosawa,et al.  Characteristics of a hybrid transducer-type ultrasonic motor , 1991, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[12]  Koichi Suzumori,et al.  Micromotor Using Electroconjugate Fluid (Fabrication of Inner Diameter 2mm RE type ECF Motor) , 2001, J. Robotics Mechatronics.

[13]  Minoru Kurosawa,et al.  Numerical analysis of the property of a hybrid transducer type ultrasonic motor , 1990, IEEE Symposium on Ultrasonics.

[14]  Shuxiang Dong,et al.  Piezoelectric ultrasonic micromotor with 1.5 mm diameter , 2003, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[15]  K. J. Gabriel,et al.  Design considerations for a practical electrostatic micro-motor , 1987 .

[16]  B. Koc,et al.  Piezoelectric micromotor using a metal-ceramic composite structure , 2000, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[17]  S. Ueha,et al.  An estimation of load characteristics of an ultrasonic motor by measuring transient responses , 1991, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[18]  L. E. Cross,et al.  Piezoelectric micromotors for microrobots , 1992 .

[19]  K. Nakamura,et al.  A torsional transducer through in-plane shearing of paired planar piezoelectric elements , 2004, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[20]  Masao Kasuga,et al.  Development of Self-oscillating Ultrasonic Micromotor , 1998 .