论文信息 - CMOS-Compatible Contacts for Si Photonics from Solid-State Reaction to Laser Integration - 字舞流文

CMOS-Compatible Contacts for Si Photonics from Solid-State Reaction to Laser Integration

F. Nemouchi | B. Szelag | C. Jany | S. Zhiou | P. Rodriguez | L. Toselli | E. Ghegin | P. Gergaud | S. Favier | S. Bensalem | M. Pasquali