Elastic constant of dielectric nano-thin films using three-layer resonance studied by picosecond ultrasonics

Elastic constants and sound velocities of nm order thin films are essential for designing acoustic filters. However, it is difficult to measure them for dielectric thin films. In this study, we use a three-layer structure where a dielectric nano-thin film is sandwiched between thicker metallic films to measure the longitudinal elastic constant of the dielectric film. We propose an efficiency function to estimate the optimal thicknesses of the components. We use Pt/NiO/Pt three-layer films for confirming our proposed method. The determined elastic constant of NiO deposited at room temperature is smaller than the bulk value by ∼40%. However, it approaches the bulk value as the deposition temperature increases. We also reveal that the uncertainty of the elastic constant of the Pt film insignificantly affects the accuracy of the determined elastic constant of NiO in this structure.

[1]  Shuji Tanaka,et al.  A spurious-free, steep band rejection filter using a LiTaO3/quartz heteroacoustic layer surface acoustic wave resonator , 2020, Japanese Journal of Applied Physics.

[2]  Shuji Tanaka,et al.  High frequency thickness expansion mode bulk acoustic wave resonator using LN single crystal thin plate , 2020, Japanese Journal of Applied Physics.

[3]  H. T. Lee,et al.  Elastic constants of beta tungsten thin films studied by picosecond ultrasonics and density functional theory , 2020, Applied Physics Letters.

[4]  H. Ogi,et al.  GHz-range resonant ultrasound spectroscopy for a free-standing nano film studied by picosecond ultrasonics , 2019, Applied Physics Express.

[5]  A. Koreeda,et al.  Zero temperature coefficient of sound velocity in vitreous silicon oxynitride thin films , 2019, Applied Physics Letters.

[6]  K. Hashimoto,et al.  Multimode coupling of modes model for spurious responses on SiO2/LiNbO3 substrate , 2018, Japanese Journal of Applied Physics.

[7]  K. Hashimoto,et al.  3.5 GHz longitudinal leaky surface acoustic wave resonator using a multilayered waveguide structure for high acoustic energy confinement , 2018, Japanese Journal of Applied Physics.

[8]  H. Ogi,et al.  Temperature behavior of sound velocity of fluorine-doped vitreous silica thin films studied by picosecond ultrasonics , 2015 .

[9]  H. Ogi,et al.  Acoustic properties of co-doped AlN thin films at low temperatures studied by picosecond ultrasonics , 2015 .

[10]  H. Ogi,et al.  Enhancement of ultrahigh-frequency vibration of an Au/Si3N4 composite resonator with picosecond ultrasound , 2014 .

[11]  H. Ogi,et al.  Elastic Stiffness of Co Thin Films at High Temperatures Monitored by Picosecond Ultrasound , 2013 .

[12]  H. Ogi,et al.  Elastic constants of cubic and wurtzite boron nitrides , 2013 .

[13]  K. Daimon,et al.  S0 Mode Lamb Wave Resonators Using LiNbO3 Thin Plate on Acoustic Multilayer Reflector , 2013 .

[14]  M. Hara,et al.  Super-High-Frequency Band Filters Configured with Air-Gap-Type Thin-Film Bulk Acoustic Resonators , 2010 .

[15]  Tatsuya Omori,et al.  Quantitative Analysis of Power Leakage in an Film Bulk Acoustic Resonator Device at the Antiresonance Frequency , 2010 .

[16]  Frederic Domingue,et al.  Guided acoustic wave resonators using an acoustic Bragg mirror , 2010 .

[17]  M. Kadota,et al.  High-Frequency Lamb Wave Device Composed of LiNbO3 Thin Film , 2008, 2008 IEEE Ultrasonics Symposium.

[18]  H. Ogi,et al.  Elastic constant and Brillouin oscillations in sputtered vitreous SiO 2 thin films , 2008 .

[19]  H. Ogi,et al.  Effects of flow rate on sensitivity and affinity in flow injection biosensor systems studied by 55-MHz wireless quartz crystal microbalance. , 2008, Analytical chemistry.

[20]  K. Hashimoto,et al.  Development of an X-Band Filter Using Air-Gap-Type Film Bulk Acoustic Resonators , 2008 .

[21]  H. Ogi,et al.  Recovery of elastic constant of ultrathin Cu films by low temperature annealing , 2008 .

[22]  H. Ogi,et al.  Mechanism of elastic softening behavior in a superlattice. , 2007, Physical Review Letters.

[23]  H. Ogi,et al.  Stiffened ultrathin Pt films confirmed by acoustic-phonon resonances. , 2007, Physical review letters.

[24]  Anthony Dickherber,et al.  Lateral field excitation of thickness shear mode waves in a thin film ZnO solidly mounted resonator , 2007 .

[25]  R. Côte,et al.  Strong oscillations detected by picosecond ultrasonics in silicon:Evidence for an electronic-structure effect , 2004 .

[26]  S. Uda,et al.  Elastic, anelastic, and piezoelectric coefficients of langasite: resonance ultrasound spectroscopy with laser-Doppler interferometry , 2003, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[27]  K. Yamanouchi,et al.  High Temperature Stable Acoustic Surface Wave Substrates of SiO2/LiNbO3 Structure with Super High Coupling , 2002 .

[28]  Kiyoshi Nakamura,et al.  Analysis of Piezoelectric Thin Film Resonators with Acoustic Quarter-Wave Multilayers , 2000 .

[29]  Satoshi Fujii,et al.  Study on Surface Acoustic Wave Characteristics of SiO2/Interdigital-Transducer/ZnO/Diamond Structure and Fabrication of 2.5 GHz Narrow Band Filter , 1998 .

[30]  Zhu,et al.  Attenuation of longitudinal-acoustic phonons in amorphous SiO2 at frequencies up to 440 GHz. , 1991, Physical review. B, Condensed matter.

[31]  Thomsen,et al.  Surface generation and detection of phonons by picosecond light pulses. , 1986, Physical review. B, Condensed matter.

[32]  Zeev Valy Vardeny,et al.  Coherent Phonon Generation and Detection by Picosecond Light Pulses , 1984 .

[33]  Naoya Uchida,et al.  Elastic Constants and Acoustic Absorption Coefficients in MnO, CoO, and NiO Single Crystals at Room Temperature , 1972 .

[34]  C. K. Jones,et al.  Anomalous temperature dependence of shear modulus c44 for platinum , 1965 .

[35]  O. Anderson,et al.  Ultrasonic Absorption in Fused Silica at Low Temperatures and High Frequencies , 1955 .

[36]  H. J. Mcskimin.  Measurement of Elastic Constants at Low Temperatures by Means of Ultrasonic Waves–Data for Silicon and Germanium Single Crystals, and for Fused Silica , 1953 .