A hybrid life cycle assessment of atomic layer deposition process

Abstract Atomic layer deposition (ALD), as a key enabling nano-manufacturing technology, has found a wide range of potential applications in a number of industrial sectors. However, due to the binary reaction and self-limiting nature of the ALD process, its life cycle environmental impact is significant but has never been investigated before. This study is conducted using a hybrid life cycle assessment (LCA) approach for evaluating the comprehensive environmental impacts of the ALD process based on the typical ALD of Al 2 O 3 high-k dielectric gate on semiconductors. The hybrid life cycle inventory analysis is conducted using process-based LCA data, economic input–output LCA data, and stoichiometric simulation data for a robust LCA study. The impact assessments are conducted using the TRACI method, with both original and U.S. normalized impact results analyzed. Normalized impact results show that, among the twelve selected impact categories, ALD produces the highest impact in the category of fossil fuels use which is 10 8 times that of the least impact in air acidification potential. Significant differences are also observed among the environmental impacts of the ALD life cycle stages. The environmental impacts associated with the auxiliary infrastructure, equipment, and tools for ALD operation are intensive mainly due to the slow ALD cycling process. This hybrid LCA study provides a comprehensive data support for understanding the potential environmental impacts of ALD nanotechnology and is useful for sustainable scale-up of the ALD technology in future.

[1]  G. Keoleian,et al.  Life cycle energy and greenhouse gas analysis of a large-scale vertically integrated organic dairy in the United States. , 2011, Environmental science & technology.

[2]  C. Yuan,et al.  Free standing TiO2 nanotube array electrodes with an ultra-thin Al2O3 barrier layer and TiCl4 surface modification for highly efficient dye sensitized solar cells. , 2013, Nanoscale.

[3]  Thomas E. Seidel,et al.  Thin film atomic layer deposition equipment for semiconductor processing , 2002 .

[4]  Jing Zhao,et al.  Ultrastable substrates for surface-enhanced Raman spectroscopy: Al2O3 overlayers fabricated by atomic layer deposition yield improved anthrax biomarker detection. , 2006, Journal of the American Chemical Society.

[5]  Chris Yuan,et al.  Environmental Implications of Nano-manufacturing , 2013 .

[6]  E. Yu,et al.  Electrochemical Monitoring of TiO2 Atomic Layer Deposition by Chronoamperometry and Scanning Electrochemical Microscopy , 2013 .

[7]  Nikhil Krishnan,et al.  A hybrid life cycle inventory of nano-scale semiconductor manufacturing. , 2008, Environmental science & technology.

[8]  Florin Ciobanu,et al.  Al2O3 prepared by atomic layer deposition as gate dielectric on 6H-SiC(0001) , 2003 .

[9]  E. Granneman,et al.  Batch ALD: Characteristics, comparison with single wafer ALD, and examples , 2007 .

[10]  Jiří Jaromír Klemeš,et al.  A review of cleaner production methods for the manufacture of methanol , 2013 .

[11]  Thomas Gloria,et al.  Development of the method and U.S. normalization database for Life Cycle Impact Assessment and sustainability metrics. , 2006, Environmental science & technology.

[12]  Keith Weitz,et al.  Life-Cycle Assessment of Waste Management Greenhouse Gas Emissions Using Municipal Waste Combustor Data , 2010 .

[13]  Marcelle C. McManus,et al.  Identifying the largest environmental life cycle impacts during carbon nanotube synthesis via chemical vapour deposition , 2013 .

[14]  Roland Hischier,et al.  Life cycle assessment of engineered nanomaterials: state of the art and strategies to overcome existing gaps. , 2012, The Science of the total environment.

[15]  Joan Rieradevall,et al.  How green is a chemical reaction? Application of LCA to green chemistry. , 2002, Environmental science & technology.

[16]  Arpad Horvath,et al.  Economic Input–Output Models for Environmental Life-Cycle Assessment , 1998 .

[17]  L. Macaskie,et al.  Microbially-enhanced chemisorption of heavy metals : A method for the bioremediation of solutions containing long-lived isotopes of neptunium and plutonium , 1998 .

[19]  David Dornfeld,et al.  Sustainability analysis of atomic layer deposition for microelectronics manufacturing , 2009, 2009 IEEE International Symposium on Sustainable Systems and Technology.

[20]  Stefanie Hellweg,et al.  Establishing Life Cycle Inventories of Chemicals Based on Differing Data Availability (9 pp) , 2005 .

[21]  Thomas L. Theis,et al.  Toward Sustainable Nanoproducts , 2008 .

[22]  Mariano Martinez,et al.  Evaluation of remanufacturing as a production alternative to reduce the magnitude of environmental impacts using TRACI , 2005 .

[23]  Jens Buchgeister,et al.  A LCA (life cycle assessment) of the methanol production from sugarcane bagasse , 2011 .

[24]  E. Bertagnolli,et al.  Atomic layer-deposited platinum in high-k/metal gate stacks , 2009 .

[25]  R. Brendel,et al.  High-rate atomic layer deposition of Al2O3 for the surface passivation of Si solar cells , 2011 .

[26]  Eric Williams,et al.  Energy intensity of computer manufacturing: hybrid assessment combining process and economic input-output methods. , 2004, Environmental science & technology.

[27]  Sean McGinnis,et al.  Nanocellulose Life Cycle Assessment , 2013 .

[28]  Anna Stoppato,et al.  Life cycle assessment of photovoltaic electricity generation , 2008 .

[29]  C. Yuan,et al.  Nano-particle emissions from Atomic Layer Deposition , 2012, 2012 IEEE International Symposium on Sustainable Systems and Technology (ISSST).

[30]  David Pennington,et al.  Recent developments in Life Cycle Assessment. , 2009, Journal of environmental management.

[31]  M. Houssa.  High k Gate Dielectrics , 2003 .

[32]  Sehee Lee,et al.  Ultrathin Direct Atomic Layer Deposition on Composite Electrodes for Highly Durable and Safe Li‐Ion Batteries , 2010, Advanced materials.

[33]  Endong Wang,et al.  An AHP-weighted aggregated data quality indicator (AWADQI) approach for estimating embodied energy of building materials , 2012, The International Journal of Life Cycle Assessment.

[34]  Peter E.D. Love,et al.  A hybrid life cycle assessment method for construction , 2000 .

[35]  F. Prinz,et al.  Application of Atomic Layer Deposition of Platinum to Solid Oxide Fuel Cells , 2008 .

[36]  Gregory A. Keoleian,et al.  Life cycle energy and environmental performance of a new university building: modeling challenges and design implications , 2003 .

[37]  Elena Rosa Domínguez,et al.  Life cycle assessment of the cogeneration processes in the Cuban sugar industry , 2013 .

[38]  Jing Liu,et al.  The analysis on energy and environmental impacts of microalgae-based fuel methanol in China , 2009 .

[39]  P. Li,et al.  Atomic Layer Deposition of UV‐Absorbing ZnO Films on SiO2 and TiO2 Nanoparticles Using a Fluidized Bed Reactor , 2008 .

[40]  S. George,et al.  Nucleation and Growth during Al2O3 Atomic Layer Deposition on Polymers , 2005 .

[41]  J. S. Ponraj,et al.  Review on Atomic Layer Deposition and Applications of Oxide Thin Films , 2013 .

[42]  Endong Wang,et al.  A hybrid Data Quality Indicator and statistical method for improving uncertainty analysis in LCA of complex system – application to the whole-building embodied energy analysis , 2013 .

[43]  S. George.  Atomic layer deposition: an overview. , 2010, Chemical reviews.

[44]  C. Yuan,et al.  Enhancing the performance of free-standing TiO2 nanotube arrays based dye-sensitized solar cells via ultraprecise control of the nanotube wall thickness , 2013 .

[45]  Arturo A. Keller,et al.  Life cycle assessment of engineered nanomaterials , 2014 .

[46]  Steven M. George,et al.  Thickness dependence of sensor response for CO gas sensing by tin oxide films grown using atomic layer deposition , 2008 .

[47]  K. Hungerbühler,et al.  Bridging data gaps in environmental assessments: Modeling impacts of fine and basic chemical production , 2009 .

[48]  Laihong Shen,et al.  Integrated Analysis of Energy, Economic, and Environmental Performance of Biomethanol from Rice Straw in China , 2009 .