Realization of p-type Se–N co-doped ZnO films by radio-frequency magnetron sputtering

Abstract Se–N co-doped ZnO films are fabricated by radio-frequency magnetron sputtering. p-type Conductivity of the co-doped films with a hole concentration of 1.14×10 16  cm −3 is realized after rapid thermal annealing, while the film without Se grown and annealed at the same condition shows n-type conductivity. The Se incorporation may enhance the solubility of N O and make the N O level shallower. Optical band gap is reduced due to Se incorporation. X-ray photoelectron spectroscopy measurements show that both Se and N take the place of O and N–Zn–Se bonding may be formed.

[1]  Z. Ye,et al.  p-type non-polar m-plane ZnO films grown by plasma-assisted molecular beam epitaxy , 2011 .

[2]  O. Sankey,et al.  Deep energy levels of defects in the wurtzite semiconductors AIN, CdS, CdSe, ZnS, and ZnO , 1983 .

[3]  H. Ho,et al.  Photoelectron spectroscopic investigation of nitrogen chemical states in ZnO : (N,Ga) thin films , 2008 .

[4]  M. McCluskey,et al.  Nitrogen is a deep acceptor in ZnO , 2011 .

[5]  E. Haller,et al.  Band structure engineering of ZnO1−xSex alloys , 2010 .

[6]  Wladek Walukiewicz,et al.  Nitrogen-induced increase of the maximum electron concentration in group III-N-V alloys , 2000 .

[7]  Marika Edoff,et al.  Strong valence-band offset bowing of ZnO1-xSx enhances p-type nitrogen doping of ZnO-like alloys. , 2006, Physical review letters.

[8]  B. Yao,et al.  Characterization and properties of ZnO1-xSx alloy films fabricated by radio-frequency magnetron sputtering , 2010 .

[9]  Wei,et al.  Giant and composition-dependent optical bowing coefficient in GaAsN alloys. , 1996, Physical review letters.

[10]  Anderson Janotti,et al.  Why nitrogen cannot lead to $p$-type conductivity in ZnO , 2009 .

[11]  David R. Clarke,et al.  On the optical band gap of zinc oxide , 1998 .

[12]  Shulin Gu,et al.  Tellurium assisted realization of p-type N-doped ZnO , 2010 .

[13]  Z. Ye,et al.  The influence of morphologies and doping of nanostructured ZnO on the field emission behaviors , 2009 .

[14]  D. G. Thomas.  The exciton spectrum of zinc oxide , 1960 .