Apparatus for analyzing contaminants in air
暂无分享,去创建一个
The present invention, more particularly, to the manufacture of semiconductor wafers used in the semiconductor manufacturing line or, in the manufacturing display panel line in the same fashion and transport the enclosure or transport cassette in the track-type automatic transport device for transporting the display glass of the contaminant monitoring device is, contamination by being formed so that the sensing means for real-time detecting a hazardous compound air is collected in the process of being carried by the track-type automatic transport device is provided in the main body, the device in one semiconductor manufacturing line, or the display panel manufacturing line different points to measure the substance and, to a real-time monitoring is possible contaminants in remote monitoring device.