An Effective Method on Vibration Immunity for Inclinometer based on MEMS Accelerometer

Inclinometer based on the Microelectro mechanical systems (MEMS) accelerometer has been applied widely in the heavy industry. However, this sensor suffers a considerable impact from external vibration. A low pass filter and moving average filter are the two most popular techniques to minimize this noise problem, but they still require other sensors to enhance efficiency. The paper proposes a Vibration Immunity (VI) filter which includes characteristics from both filters to minimize the noise optimally. A robust testbench was constructed by the Pan-Tilt Unit and a TUMAC vibrator to verify the proposed filters, implemented into a MEMS accelerometer LSM9DS1. The experimental result shows significant improvement after using the VI technique, respecting the moving average filter in noise reduction and stability.

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