이온주입용 정밀고압 발생장치 연구

A precision high voltage generator for ion injection is implemented on HFZVS-PSCI (Phase-Shift-Controlled Inverter). Some practical aspects of implementing precision high voltage generator with HFZVS-PSCI, such an a HFHV transformer, multiflier, and precision CR divider are fast dynamic response, low ripple voltage, and high accuracy.