论文信息 - In-situ Processing Of GaAs/AiGaAs By Low Damage Selective Etching And Focussed Ion Beam Patterning - 字舞流文

In-situ Processing Of GaAs/AiGaAs By Low Damage Selective Etching And Focussed Ion Beam Patterning

L. Coldren | P. Petroff | E. Hu | J. English | D. Young | J. Skidmore | D. L. Green | Z. Xu | G. D. Spiers