MEMS accelerometer based on capacitive readout IC MS3110

MS3110 is a universal capacitive readout(UCR) integrated circuit(IC).In this paper,its configuration,operating principle and usage are introduced.A method of programming the EEPROM on-chip with single chip microcomputer is presented with the chief writing and reading control block diagram.Based on the UCR IC,a new MEMS accelerometer with multi-finger micro-machined sensor is designed,in which force-rebalanced with lag proportional-integral controller is applied to implement the closed-loop system.The measurement result shows that this accelerometer can work under closed-loop condition and obtain improved performances.