Characterization of ZnO:Al thin films obtained by spray pyrolysis technique

Abstract Films of zinc oxide doped with Al (ZnO:Al) are prepared using the spray pyrolysis technique. The effect of doping Al on the physical properties of ZnO:Al is studied. In this study the polycrystalline ZnO:Al films with the different Al concentration ([Al]/[Zn] in the starting solution was varied from 0 to 0.6 wt.%) were prepared. These films were confirmed to show the high crystallinity by X-ray diffraction technique. The smallest sheet resistance value, around 207 Ω/□, was obtained using a [Al]/[Zn] ratio of 0.125 wt.% in starting solution. The optical transmittance was about 75% in visible range for the optimum film.

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