论文信息 - A feasibility study for a self-oscillating loop for a three degree-of-freedom coupled MEMS resonator force sensor

A feasibility study for a self-oscillating loop for a three degree-of-freedom coupled MEMS resonator force sensor

Abstract For the first time, we investigate a self-oscillating control loop for a three degree-of-freedom (DoF) weakly coupled MEMS resonator sensor for force sensing applications. This is an important step towards real-time measurements using such a sensor. The simulated results successfully demonstrated that, without any external drive signals, the proposed self-oscillating loop is able to automatically lock to the desired mode frequency for the sensing applications. The amplitude ratios from the simulation showed good agreement with the theoretical values.

Michael Kraft | Suan Hui Pu | Chun Zhao | Graham S. Wood

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