Annealed proton-exchanged LiNbO3 ridge waveguide for photonics application

In this paper, we report a novel LiNbO3 ridge waveguide fabrication technique based on the combination of Annealed Proton-Exchanging (APE) and precise diamond blade dicing. The process is ultra compact and compatible with periodically polled LiNbO3 (PPLN). By selecting optimized fabrication conditions, ridge waveguide with low propagation loss and single transmission mode can be formed at 1064nm and 1500nm wavelength, respectively. Such APE ridge waveguides have potential applications in optical communication, biomedical detection, and especially in nonlinear wavelength conversion.

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