Interference methods for surface roughness measurement

The relationship between statistical structure parameters of rough surface and associated correlation parameters of scattered field is used to develop the methods for rough surface diagnostics. The treatment is based on the model of random phase object with inhomogeneity phase dispersion (sigma) (psi) O2 < 1. The proposed diagnostic methods are applicable to surfaces with roughness period comparable to the radiation wavelength employed, thin plane-parallel plate surfaces, plane low-reflectance surfaces, and arbitrarily shaped surfaces. The sensitivity limit of the methods in measuring the standard deviation of surface profile from base line is about 0.003 micrometers .