X-ray imaging spectroscopy of an electron cyclotron resonance discharge

A pinhole camera with an x‐ray sensitive charge‐coupled device array was used to analyze x‐rays emitted from an electron cyclotron resonance (ECR) discharge. The camera was operated at a temperature of 140 K, allowing single photon detection at integration times up to several hours. This technique simultaneously allows spectroscopic investigations as well as x‐ray imaging. Thus, the geometrical size and x‐ray emission profiles from an ECR plasma were measured.