Automated Visual Inspection: A Survey

This paper surveys publications, reports, and articles dealing with automated visual inspection for industry. The references are organized according to their contents: overview and discussions, rationales, components and design considerations, commercially available systems, applications. A number of applications and their inspection methodologies are discussed in detail: the inspection of printed circuit boards, photomasks, integrated circuit chips. Other inspection applications are listed as a bibliography. A list of selectively annotated references in commercially available visual inspection tools is also included.

[1]  Brian D. Clay.  A Photo-Electronic Method For The Monitoring Of Deformation In Nuclear Fuel Cladding Tubes , 1978, Other Conferences.

[2]  D. J. Kopydlowski.  Missing-Hole Detection System Using Solid-State Video Cameras , 1979, Other Conferences.

[3]  Patrick Meyrueis,et al.  Application of Laser Engineering to Industrial Measurement of Commercialized Diamonds , 1980, Optics & Photonics.

[4]  Erickson,et al.  On-line automatic high speed inspection of cartridge cases , 1974 .

[5]  H. L. Kasdan.  Recent Developments In Automatic Visual Inspection , 1978, Other Conferences.

[6]  D. Schroeder,et al.  Component Verification System , 1980 .

[7]  R. V. .. Williams.  Applied Optics In The European Coal And Steel Community Its Application To Quality Control , 1975, Other Conferences.

[8]  Masatsugu Kidode,et al.  New Image Processing Hardwares And Their Applications To Industrial Automation , 1979, Other Conferences.

[9]  William S. Maughan.  The Use Of Automatic Optical Sorting Equipment For Industrial Quality Control , 1975, Other Conferences.

[10]  Juan J. Amodei.  Optics In Automated Inspection , 1975, Other Conferences.

[11]  David T. Lee.  Considerations In The Design And Specifications Of An Automatic Inspection System , 1980, Photonics West - Lasers and Applications in Science and Engineering.

[12]  Azriel Rosenfeld.  Picture processing: 1978 , 1979 .

[13]  Charles C. K. Cheng.  Automated Recognition System For Industrial Quality Assurance , 1979, Optics & Photonics.

[14]  David Kryger,et al.  Microdensitometer Measurements Of Photomask Quality , 1980, Photonics West - Lasers and Applications in Science and Engineering.

[15]  L. Arlan,et al.  Thick-Film Hybrid Inspection With A Computer-Controlled High Resolution Imaging And Storage System , 1980, Photonics West - Lasers and Applications in Science and Engineering.

[16]  Josef Kittler,et al.  Automatic inspection by lots in the presence of classification errors , 1980, Pattern Recognit..

[17]  J. R. Parks.  Intelligent machines??commercial potential , 1977 .

[18]  John F. Jarvis.  A Method for Automating the Visual Inspection of Printed Wiring Boards , 1980, IEEE Transactions on Pattern Analysis and Machine Intelligence.

[19]  L. S. Watkins.  Inspection of integrated circuit photomasks with intensity spatial filters , 1969 .

[20]  T. Pavlidis,et al.  Visual printed wiring board fault detection by a geometrical method , 1979, COMPSAC.

[21]  John D. Gould,et al.  Field of View and Target Uncertainty in Visual Search and Inspection , 1973 .

[22]  B. J. Tucker.  The Comp-Gage, A Computerized Electro-Optical Gage , 1978, Other Conferences.

[23]  David Nitzan,et al.  Programmable Industrial Automation , 1976, IEEE Transactions on Computers.

[24]  D. Nyyssonen.  Linewidth measurement with an optical microscope: the effect of operating conditions on the image profile. , 1977, Applied optics.

[25]  Laveen N. Kanal,et al.  Patterns in pattern recognition: 1968-1974 , 1974, IEEE Trans. Inf. Theory.

[26]  C. J. D. M. Verhagen.  General Survey Of Image Processing Applications, Past And Future , 1978, Other Conferences.

[27]  Kunihiko Edamatsu,et al.  Visual Inspection System , 1983 .

[28]  D. J. Purll,et al.  On-Line Volume Measurement Of Bulk Materials , 1978, Other Conferences.

[29]  André Oosterlinck,et al.  Automatic Visual Inspection Of Reed Switches , 1980 .

[30]  William A. Bentley.  The Inspectron: An Automatic Optical Printed Circuit Board (PCB) Inspector , 1979, Optics & Photonics.

[31]  C. B. Chittineni.  Signal classification for automatic industrial inspection , 1982 .

[32]  Harvey Lee Van Kasdan,et al.  Quality Control By Diffraction Pattern Analysis , 1975, Other Conferences.

[33]  Kenneth A. Snow.  Optical Problems Of Small Geometry Automatic Mask Inspection , 1978, Other Conferences.

[34]  William A. Bentley.  Automated Optical Inspection Of Multilayer Printed Circuit Boards , 1980, Photonics West - Lasers and Applications in Science and Engineering.

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[36]  Christopher J. Taylor,et al.  Automated asbestos fibre counting , 1979 .

[37]  Alan Pugh,et al.  Orientation And Inspection Of Component Parts , 1978, Other Conferences.

[38]  Burton D. Figler.  Photomask Mensuration With The Linear Microdensitometer , 1980, Photonics West - Lasers and Applications in Science and Engineering.

[39]  Azriel Rosenfeld,et al.  Picture processing: 1972 , 1972, Comput. Graph. Image Process..

[40]  Theodosios Pavlidis,et al.  A Minimum Storage Boundary Tracing Algorithm and Its Application to Automatic Inspection , 1978 .

[41]  R. A. Brook,et al.  Practical Experience Of Image Processing In On-Line Industrial Inspection Applications , 1978, Other Conferences.

[42]  Ware Myers,et al.  Industry Begins to Use Visual Pattern Recognition , 1980, Computer.

[43]  Robert C. Restrick.  An Automatic Optical Printed Circuit Inspection System , 1977, Optics & Photonics.

[44]  Gerald S. Birth,et al.  Applications Of Electro-Optical Techniques To Nondestructive Quality Evaluation Of Foods , 1978, Other Conferences.

[45]  R.W. Bolz,et al.  Industrial lasers and their applications , 1975, Proceedings of the IEEE.

[46]  William Edward Wolf.  On-line Inspection For Nonwoven Fabrics , 1980, Photonics West - Lasers and Applications in Science and Engineering.

[47]  Richard H. Searle.  Evolution of an Electro-Optical Automatic Gaging System , 1979 .

[48]  Azriel Rosenfeld,et al.  Picture processing: 1973 , 1974, Comput. Graph. Image Process..

[49]  R. P. Kruger,et al.  Industrial Applications Of Computed Tomography At Los Alamos Scientific Laboratory , 1980 .

[50]  David Nitzan,et al.  Use of Sensors in Programmable Automation* , 1977, Computer.

[51]  Masakazu Ejiri,et al.  A Transistor Wire-Bonding System Utilizing Multiple Local Pattern Matching Techniques , 1976, IEEE Transactions on Systems, Man, and Cybernetics.

[52]  Shawn Buckley,et al.  PHASE MONITORING FOR AUTOMATED INSPECTION, POSITIONING AND ASSEMBLY. , 1977 .

[53]  Harold Berger,et al.  An Overview--Advantages Of Imaging Techniques For Nondestructive Testing , 1972, Other Conferences.

[54]  Gene P. Weckler.  Image Detection For Industrial Gaging And Inspection , 1975, Other Conferences.

[55]  A. Takaki,et al.  Automated Inspection System For Various Defects In Screen-Printed Patterns , 1979, Other Conferences.

[56]  Joseph L. Mundy,et al.  Visual Inspection System Design , 1980, Computer.

[57]  L. W. Wright.  Results of X-ray television inspection of electronic parts. , 1967 .

[58]  L. U. Almi,et al.  ONE-DIMENSIONAL FOURIER TRANSFORM FOR THE INSPECTION OF PHOTOMASKS , 1977 .

[59]  S. Coren,et al.  Visual spatial illusions: many explanations. , 1973, Science.

[60]  Michihiro Mese,et al.  A process for detecting defects in complicated patterns , 1973, Comput. Graph. Image Process..

[61]  R. N. West.  Automatic Inspection of Photographic Materials , 1978 .

[62]  Azriel Rosenfeld,et al.  Picture processing: 1977 , 1978 .

[63]  Hiroyasu Koshimizu,et al.  Fundamental Study On Automatic Fabric Inspection By Computer Image Processing , 1979, Other Conferences.

[64]  Azriel Rosenfeld,et al.  Picture processing: 1975 , 1976 .

[65]  Takafumi Miyatake,et al.  An Automatic Position Recognition Technique for LSI Assembly , 1977, IJCAI.

[66]  R. P. Kruger,et al.  Simulated Neutron Tomography For Nondestructive Assays , 1979, Other Conferences.

[67]  Mohamed F. A. Fadl.  A Look At Inspection Equipment Of The Future , 1978, Other Conferences.

[68]  Roger R. A. Morton.  Use Of Software For Pattern Classification , 1978, Other Conferences.

[69]  Paul Sandland.  Automatic Inspection Of Mask Defects , 1977, Other Conferences.

[70]  Gerald J. Agin.  Computer Vision Systems for Industrial Inspection and Assembly , 1980, Computer.

[71]  D. R. Ciarlo,et al.  Automated Inspection Of IC Photomasks , 1974, Optics & Photonics.

[72]  Dorothea H. Jirauch.  Software Design Techniques for Automatic Checkout , 1967, IEEE Transactions on Aerospace and Electronic Systems.

[73]  Perry West,,et al.  Precision Optical Gauging With Image Sensing Camera And Programmable Microprocessor Controller , 1980, Other Conferences.

[74]  K. L. Swinth,et al.  Automatic Cartridge Case Inspection And Process Control Monitor , 1977, Optics & Photonics.

[75]  L. T. Clarke.  The Use Of Self Scanned Arrays In The Glass Industry , 1978, Other Conferences.

[76]  C A Hudson.  Computers in Manufacturing , 1982, Science.

[77]  Alan Pugh,et al.  The prospects for sensory arrays and microprocessing computers in manufacturing industry , 1977 .

[78]  R. Allan.  Electronics to boost productivity: Computer technology spurs automation, energy cuts , 1978, IEEE Spectrum.

[79]  Thomas S. Huang.  Electronic Processing In Flaw Detection , 1975, Other Conferences.

[80]  P. A. McKeown,et al.  The Application Of Optics To The Quality Control Of Automotive Components , 1975, Other Conferences.

[81]  S. C. Bottomley,et al.  Optics A La Carte , 1975, Other Conferences.

[82]  Wesley E. Snyder,et al.  Hardware for visual image processing , 1975 .

[83]  M. P. Wirick,et al.  Infrared Testing Of Printed Circuit Boards And Hybrids , 1980, Photonics West - Lasers and Applications in Science and Engineering.

[84]  Masahiko Yachida,et al.  Industrial Computer Vision in Japan , 1980, Computer.

[85]  Azriel Rosenfeld,et al.  Progress in Picture Processing: 1969--71 , 1973, CSUR.

[86]  Azriel Rosenfeld,et al.  Picture processing: 1976 , 1977 .

[87]  John Caulfield,et al.  An Optical Recognition And Classification System (ORACS) For On-Line Inspection Of Assemblies , 1977, Optics & Photonics.

[88]  Charles A. Harlow.  Image analysis and graphs , 1973, Comput. Graph. Image Process..

[89]  R.W. Ehrich,et al.  Computer image processing and recognition , 1981, Proceedings of the IEEE.

[90]  J. Barney,et al.  Infrared Imaging For Thermal Analysis Of Quality Control And Reliability Problems , 1975, Other Conferences.

[91]  Richard H. Moore.  Laser-Based Non-Contact Gauge For Small Parts Inspection , 1978, Other Conferences.

[92]  L. A. Branaman.  Recent Applications Of Electronic Vision To Noncontact Automatic Inspection , 1979, Other Conferences.

[93]  William B. Thompson.  Machine Perception for Industrial Applications , 1980, Computer.

[94]  Takefumi Inagaki,et al.  Ceramic Surface Inspection Using Laser Technique , 1975 .

[95]  D. Nyyssonen.  Optical Linewidth Measurements On Silicon And Iron-Oxide Photomasks , 1977, Other Conferences.

[96]  Robert T. Chien,et al.  Visual Understanding Of Hybrid Circuits Via Procedural Models , 1975, IJCAI.

[97]  Richard P. Speck.  Practical Aspects Of Automatic Mask Inspection , 1980, Other Conferences.

[98]  Joseph L. Mundy,et al.  Visual inspection of metal surfaces , 1899, 1979 International Workshop on Managing Requirements Knowledge (MARK).

[99]  R. B. Lewis.  The Use Of Solid-State Image Scanners In The British Railways Track Recording Coach , 1978, Other Conferences.

[100]  J.H. Bruning,et al.  An automated mask inspection system—AMIS , 1975, IEEE Transactions on Electron Devices.

[101]  Harvey R. Seliner.  Using Microprocessors For Image Processing , 1979, Optics & Photonics.

[102]  Ian McFarlane.  Development Of The "Heightscan" Thickness Gauge , 1978, Other Conferences.

[103]  Robert E. Bible.  A High-Precision Production-Oriented Gage Utilizing A Solid State Image Sensor And Microprocessor , 1978, Other Conferences.

[104]  W. H. Gray,et al.  X-Ray Real-Time Imaging For Nondestructive Testing Of Fast Flux Test Facility Fuel Pins , 1972, Other Conferences.

[105]  B. G. Batchelor,et al.  Defect Detection On The Internal Surfaces Of Hydraulics Cylinders For Motor Vehicles , 1979, Other Conferences.

[106]  Lewis C. Page.  Inspection Of Parts In Micro-Inches With A Closed Circuit Television System Or How To Measure To A Half-Millionth Of An Inch Without Hardly Trying , 1978, Other Conferences.

[107]  L. R. Baker,et al.  Surface Inspection of Optical and Semiconductor Components , 1976 .

[108]  C. R. Snyder.  Selection, inspection, and naming in visual search. , 1972, Journal of experimental psychology.

[109]  John G. Skinner.  The Use Of An Automatic Mask Inspection System (AMIS) In Photomask Fabrication , 1977, Other Conferences.

[110]  Stephen T. Barnard.  Automated Inspection Using Gray-Scale Statistics , 1980, AAAI.

[111]  Masato Nakashima,et al.  Automatic Mask Pattern Inspection For Printed Circuits Based On Pattern Width Measurement , 1979, Other Conferences.

[112]  R. P. Kruger,et al.  Digital image analysis applied to industrial nondestructive evaluation and automated parts assembly , 1979 .

[113]  J. R. Parks,et al.  Industrial Sensory Devices , 1978 .

[114]  Charles A. Harlow,et al.  Automatic Visual Inspection Of Printed Circuit Boards , 1979, Optics & Photonics.

[115]  R.Curt Grove,et al.  Real-Time Image Processing System For Automated Inspection Of Drilled Holes , 1980, Optics & Photonics.

[116]  Robert A. Wey,et al.  Optical Sensing Of Cell-Structure Defects In Catalytic Converter Substrates , 1975, Other Conferences.

[117]  Azriel Rosenfeld.  Picture processing: 1979 , 1980 .

[118]  L. Watkins,et al.  Application of spatial filtering subtraction to thin film and integrated circuit mask inspection. , 1973, Applied optics.

[119]  Nobuyuki Akiyama,et al.  STUDY ON AUTOMATIC INSPECTION OF DEFECTS ON CONTACT PARTS , 1977 .

[120]  Azriel Rosenfeld,et al.  Computer Methods in Image Analysis , 1977 .

[121]  W.C. Lin,et al.  Feasibility study of automatic assembly and inspection of light bulb filaments , 1975, Proceedings of the IEEE.

[122]  D. J. Purll.  Survey Of The Present State Of The Art In Applications Of Solid-State Image Scanners , 1978, Other Conferences.

[123]  Russell A. Kirsch,et al.  Image Analysis in Paper Manufacturing , 1977 .

[124]  Charles A. Harlow,et al.  Automated Inspection of Electronic Assemblies , 1975, Computer.

[125]  I. L. Morgan,et al.  Tomographic Analysis Of Structural Materials , 1979, Other Conferences.

[126]  Berthold K. P. Horn.  A problem in computer vision , 1975 .

[127]  M. Thomas Jackson.  On-line Optical Gaging , 1980, Photonics West - Lasers and Applications in Science and Engineering.

[128]  Saburo Tsuji.  Survey On Vision Systems For Advanced Automation In Japan , 1979, Other Conferences.

[129]  Masao Sawaji.  Measuring Method Of Quality Of Luster: Measurement And Analysis Of Microstructural Reflection Characteristics , 1979, Other Conferences.

[130]  Richard A. Brook.  Development of techniques for automated industrial inspection in the United Kingdom in the age of microprocessors , 1979, Other Conferences.

[131]  R. D. Taylor.  Rapid visual scanning , 1976 .

[132]  Douglas H. Harris,et al.  The Nature of Industrial Inspection1 , 1969 .

[133]  N. N. Axelrod.  Intensity spatial filtering applied to defect detection in integrated circuit photomasks , 1972 .

[134]  D. R. Ciarlo.  IC inspection test masks: experimental results , 1977 .

[135]  John David Cuthbert,et al.  A Microelectronic Mask Inspection System Based on Single Spot Laser Scan Techniques , 1975 .

[136]  David L. Davies,et al.  Discontinuous Registration Of Industrial Radiographs Using Profile Analysis And Piecewise Correlation Techniques , 1980 .

[137]  A. L. Wertheimer,et al.  Light Scattering Instrumentation For Particulate Measurements In Processes , 1978, Other Conferences.

[138]  J. V. Daele,et al.  The Leuven Automatic Visual Inspection Machine (LAVIM) , 1979, Other Conferences.

[139]  David T. Lee.  A Computerized Automatic Inspection System For Complex Printed Thick Film Patterns , 1978, Other Conferences.

[140]  Dennis M. Swing.  Dimensional Gauging Using A Scanning Laser , 1975, Other Conferences.

[141]  A. J. Barker,et al.  A Design Study of an Automatic System for On-line Detection and Classification of Surface Defects on Cold-rolled Steel Strip , 1978 .

[142]  D. J. Purll.  Automated Surface Inspection With Solid-State Image Sensors , 1978, Other Conferences.

[143]  Joseph Wilder.  Applications Of A Flexible Pattern Recognition System In Industrial Inspection , 1979, Other Conferences.

[144]  Nobuaki Takahashi,et al.  Optical Measuring Device For Interior Dimensions Of Automobiles , 1980, Optics & Photonics.

[145]  Berthold K. P. Horn.  Orienting silicon integrated circuit chips for lead bonding , 1975 .

[146]  R. Day.  Visual Spatial Illusions: A General Explanation , 1972, Science.

[147]  Dennis H. Locke.  Lithographic Plate Surface Inspection Using Fiber Optics , 1975, Other Conferences.

[148]  Roger A. Morris.  Image Processing Applications In Nondestructive Examination (NDE) , 1980, Photonics West - Lasers and Applications in Science and Engineering.

[149]  J. R. Parks,et al.  Image Processing - A New Tool For Quality Control , 1978, Other Conferences.

[150]  Masahiko Yachida,et al.  Panel Discussion On Industrial Visual Automation , 1979, Other Conferences.

[151]  Ray W. Pfoutz.  Digital Optics For Dimensional Gauging Of Fabricated Parts And Continuous Webs , 1975, Other Conferences.

[152]  John F. Jarvis.  Visual Inspection Automation , 1980, Computer.

[153]  Azriel Rosbnfeld,et al.  Picture processing: 1974 , 1975 .

[154]  O. Firschein,et al.  Automatic Inspection Of Artillery Shell Radiographs , 1979, Optics & Photonics.

[155]  D. H. Nyman,et al.  Automatic Surface Flaw Inspection Of Nuclear Fuel Pellets , 1978, Other Conferences.

[156]  Y. Furukawa,et al.  Inspection for defects of a mask containing one‐ to submicrometer patterns using a scanning electron microscope and feature extraction method , 1978 .

[157]  P. D. Poulsen,et al.  Inspection Of Axially Symmetric Parts , 1975, Other Conferences.

[158]  Azriel Rosenfeld,et al.  Pattern Recognition and Image Processing , 1976, IEEE Transactions on Computers.

[159]  L. Arlan,et al.  High-Resolution Computer-Controlled Television System For Hybrid Circuit Inspection , 1979, Other Conferences.