A light-weight optics-free EUV spectrometer with substantially improved efficiency and spectral resolution

We present a simple EUV spectrometer based on chemically inert rare gas photon ionization and energy analysis of the resulting electrons. Precise photoelectron focusing and high electron transmission efficiency from the gas ionization area to the detector are combined with an optimum luminosity angle of 90 deg in an axi-symmetric design. All together, these features will allow us to achieve higher efficiency and spectral resolution than other spectrometers of this type reported to date. The modeled (neon) spectral resolution in the spectral range of 5 - 40 nm is 0.1 - 0.035 nm, respectively. A model of the proposed photoelectron focusing system is analyzed.

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