Trade-off analysis of the p-base doping on ruggedness of SiC MOSFETs

Abstract Reliability represents a very important factor for the design of Silicon Carbide (SiC) power metal oxide semiconductor field effect transistors (MOSFETs). Ruggedness of the device during abnormal operating conditions like the short circuit (SC) and avalanche conduction (during unclamped inductive switching - UIS) is an important aspect of reliability. Often, variation in design parameters to improve ruggedness during SC and UIS shows negative impact on the nominal operating performance. This paper presents a comprehensive analysis of the impact of modification of p-base doping on the performance of a 1.2 kV SiC MOSFET during SC and UIS by means of TCAD simulations. The improvement in MOSFET ruggedness by optimizing the p-base doping and its influence on the nominal operating performance is evaluated.

[1]  B. J. Baliga Advanced Power MOSFET Concepts , 2010 .

[2]  J. W. Palmour,et al.  Electro-thermal simulation of 1200 V 4H-SiC MOSFET short-circuit SOA† , 2015, 2015 IEEE 27th International Symposium on Power Semiconductor Devices & IC's (ISPSD).

[3]  Cheng Chen,et al.  Study of short-circuit robustness of SiC MOSFETs, analysis of the failure modes and comparison with BJTs , 2015, Microelectron. Reliab..

[4]  Comprehensive and Detailed Study on the Modeling of Commercial SiC Power MOSFET Devices Using TCAD , 2016, 2016 European Conference on Silicon Carbide & Related Materials (ECSCRM).

[5]  Masayuki Imaizumi,et al.  Investigation into Short-Circuit Ruggedness of 1.2 kV 4H-SiC MOSFETs , 2008 .

[6]  L. Tolbert,et al.  Temperature-Dependent Short-Circuit Capability of Silicon Carbide Power MOSFETs , 2016, IEEE Transactions on Power Electronics.

[7]  T. V. Thang,et al.  Gate Oxide Reliability Issues of SiC MOSFETs Under Short-Circuit Operation , 2015, IEEE Transactions on Power Electronics.

[8]  Andrea Irace,et al.  SiC power MOSFETs performance, robustness and technology maturity , 2016, Microelectron. Reliab..

[9]  Andrea Irace,et al.  Experimental analysis of electro-thermal instability in SiC Power MOSFETs , 2013, Microelectron. Reliab..

[10]  A. Irace,et al.  Influence of design parameters on the short-circuit ruggedness of SiC power MOSFETs , 2016, 2016 28th International Symposium on Power Semiconductor Devices and ICs (ISPSD).