论文信息 - High-quality 6 inch (111) 3C-SiC films grown on off-axis (111) Si substrates - 字舞流文

High-quality 6 inch (111) 3C-SiC films grown on off-axis (111) Si substrates

C. Bongiorno | G. Condorelli | A. Magna | M. A. D. Stefano | M. Camarda | N. Piluso | F. Via | A. Severino | M. Mauceri | B. Cafra | M. Italia