论文信息 - A predictive methodology for accurate substrate parasitic extraction

A predictive methodology for accurate substrate parasitic extraction

A methodology for determining the substrate profile for accurate prediction of parasitics using Green's function based substrate extractors is presented. The technique requires fabrication of only a few test structures and results in an accurate three layered approximation. The substrate resistances are accurate to within 10% measurements. This methodology can be used along with scalable macromodel for a qualitative pre-design and pre-layout estimation of the digital switching noise that couples though the substrate to sensitive analog/RF circuits.

[1] N. P. van der Meijs,et al. Fast computation of substrate resistances in large circuits , 1996, Proceedings ED&TC European Design and Test Conference.

[2] David J. Allstot,et al. Fast parasitic extraction for substrate coupling in mixed-signal ICs , 1995, Proceedings of the IEEE 1995 Custom Integrated Circuits Conference.

[3] Robert G. Meyer,et al. Modeling and analysis of substrate coupling in integrated circuits , 1995, Proceedings of the IEEE 1995 Custom Integrated Circuits Conference.

[4] D. Marquardt. An Algorithm for Least-Squares Estimation of Nonlinear Parameters , 1963 .

[5] David J. Allstot,et al. Simulation techniques and solutions for mixed-signal coupling in integrated circuits , 1994 .

[6] N. P. van der Meijs,et al. Boundary element methods for 3D capacitance and substrate resistance calculations in inhomogeneous media in a VLSI layout verification package , 1994 .

[7] Terri S. Fiez,et al. A comprehensive geometry-dependent macromodel for substrate noise coupling in heavily doped CMOS processes , 2002, Proceedings of the IEEE 2002 Custom Integrated Circuits Conference (Cat. No.02CH37285).

[8] Robert G. Meyer,et al. Modeling and analysis of substrate coupling in integrated circuits , 1996 .

[9] João Paulo Costa,et al. Efficient techniques for accurate modeling and simulation of substrate coupling in mixed-signal IC's , 1998, IEEE Trans. Comput. Aided Des. Integr. Circuits Syst..