Ultrasonic linear motors using a multilayered piezoelectric actuator
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Abstract A new type of linear motor using a multilayered piezoelectric actuator has been developed in which a mechanically resonating part slides on a stationary rail. The slider consists of a multilayered piezoelectric actuator and an elastic vibratory fork bonded together. The key to obtaining a smooth movement is to realize a slight shift in the resonance frequency of each leg of the fork so that the moving direction can be controlled by changing the drive frequency.
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