Ultrasonic linear motors using a multilayered piezoelectric actuator

Abstract A new type of linear motor using a multilayered piezoelectric actuator has been developed in which a mechanically resonating part slides on a stationary rail. The slider consists of a multilayered piezoelectric actuator and an elastic vibratory fork bonded together. The key to obtaining a smooth movement is to realize a slight shift in the resonance frequency of each leg of the fork so that the moving direction can be controlled by changing the drive frequency.