Impact of process variability on a frequency-addressed NEMS array sensor used for gravimetric detection

Based on experimental results and a dedicated model, the impact of various technological parameters on the performance of a frequency addressed NEMS arrays sensor is investigated for mass sensing application. It is shown that the number of NEMS resonators that can be addressed in parallel is limited by critical dimensions fluctuations, the quality factor of the NEMS and their resonance frequencies.

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