Integrated micro-electro-mechanical sensor development for inertial applications

Electronic sensing circuitry and micro-electromechanical sense elements can be integrated to produce inertial instruments for applications unheard of a few years ago. This paper describes the Sandia M/sup 3/EMS fabrication process, inertial instruments that have been fabricated, and the results of initial characterization tests of micro-machined accelerometers.

[1]  T. A. Roessig,et al.  Surface-micromachined resonant accelerometer , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[2]  Brady R. Davies,et al.  High-G MEMS integrated accelerometer , 1997, Smart Structures.

[3]  J.H. Smith,et al.  A 3-axis surface micromachined /spl Sigma//spl Delta/ accelerometer , 1997, 1997 IEEE International Solids-State Circuits Conference. Digest of Technical Papers.

[4]  Ernest J. Garcia,et al.  Microfabricated actuators and their application to optics , 1995, Photonics West.

[5]  Roger T. Howe,et al.  Surface micromachined, digitally force-balanced accelerometer with integrated CMOS detection circuitry , 1992, Technical Digest IEEE Solid-State Sensor and Actuator Workshop.

[6]  Paul J. McWhorter,et al.  Embedded micromechanical devices for the monolithic integration of MEMS with CMOS , 1995, Proceedings of International Electron Devices Meeting.

[7]  Wolfgang Kuehnel,et al.  A surface micromachined silicon accelerometer with on-chip detection circuitry , 1994 .

[8]  A.P. Pisano,et al.  Dual axis operation of a micromachined rate gyroscope , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).