论文信息 - A numerical model of silane pyrolysis in a gas-solids fluidized bed

A numerical model of silane pyrolysis in a gas-solids fluidized bed

Recentexperimentshave shown thatsilanepyrolysisin agas-solidsfluidizedbedmaybe anattracti ve way to produceultra-puresilicon. Sucha processwould possessthegeneral advantagesof fluidizedbedtechnology , namely, goodcontacting,thermalhomogeneity , thoroughmixing of particles,easysolidshandling,andlow pressuredrop. Sucha fluidizedbedreactoris simulatedusingthetwo-fluid hydrodynamicmodelMFIX (MultiphaseFlow with InterphaseeXchanges; www.mfix.org), developedat theNational Energy TechnologyLaboratory. Using MFIX three-dimensional simulationsof silane pyrolysis areperformed. The chemistryis describedby a simple set of homogeneous andheterogeneous reactions.Resultsarecomparedto availableexperimentaldatawhere silicon depositionrateson a bed of aluminaparticleswere measuredas a function of temperature, bedheight,andfluidizationvelocity.

[1] Ulrich Renz,et al. Eulerian simulation of bubble formation at a jet in a two-dimensional fluidized bed , 1997 .

[2] J. X. Bouillard,et al. Hydrodynamics of fluidization: Fast-bubble simulation in a two-dimensional fluidized bed , 1991 .

[3] Toshinori Kojima,et al. CHEMICAL VAPOR DEPOSITION AND HOMOGENEOUS NUCLEATION IN MONOSILANE PYROLYSIS WITHIN INTERPARTICLE SPACES -APPLICATION OF FINES FORMATION ANALYSIS TO FLUIDIZED BED CVD- , 1988 .

[4] R. Jackson,et al. The mechanics of fluidized beds. I. The stability of the state of uniform fluidization , 1963 .

[5] J. Sanyal,et al. On the effect of various momentum transfer coefficient models on bubble dynamics in a rectangular gas fluidized bed , 1994 .

[6] J. Couderc,et al. Silicon deposition from silane or disilane in a fluidized bed—Part II: Theoretical analysis and modeling , 1995 .

[7] M. Syamlal,et al. MFIX documentation theory guide , 1993 .

[8] Jam Hans Kuipers,et al. Computer simulation of the hydrodynamics of a two-dimensional gas-fluidized bed , 1993 .