Strain-driven self-positioning of micromachined structures
暂无分享,去创建一个
[1] Y. Uenishi,et al. Characterization of AlGaAs microstructure fabricated by AlGaAs/GaAs micromachining , 1994 .
[2] J. W. Matthews,et al. Defects in epitaxial multilayers , 1974 .
[3] Inspec,et al. Properties of lattice-matched and strained indium gallium arsenide , 1993 .
[4] G. Saunders,et al. The elastic constants of GaAs from 2 K to 320 K , 1973 .
[5] Bernard Courtois,et al. Bulk micromachining characterization of 0.2 μm HEMT MMIC technology for GaAs MEMS design , 1998 .
[6] A. K. Gutakovsky,et al. Nanoscale engineering using controllable formation of ultra-thin cracks in heterostructures , 1996 .