Theoretical modeling, design, fabrication, and testing of porous-silicon-based capacitive vapor sensor

Capacitive type vapour sensor based on porous silicon (PS) transducer has been presented. Sensing mechanism of ambient vapour concentration by PS has been modeled with an effective medium approximation (EMA) considering adsorption-diffusion-condensation kinetics of vapour molecules inside the porous bulk. Optimized pore size and pore morphology for sensing of different vapours having widely different molecular weight and volume selectively have also been studied.