论文信息 - Electrical and structural characterization of 150 nm CNT contacts with Cu damascene top metallization - 字舞流文

Electrical and structural characterization of 150 nm CNT contacts with Cu damascene top metallization

M. H. van der Veen | C. Huyghebaert | Z. Tokei | S. De Gendt | P. Vereecken | X. Ke | D. Cott | B. Vereecke | M. Sugiura | J. Vanpaemel | Y. Kashiwagi