Development and control of a versatile nanohandling robot cell

Current research work on the development of a nanohandling robot cell in a scanning electron microscope (SEM) is presented. An experimental setup is shown, in which two microrobots cooperate in the vacuum chamber of an SEM. One microrobot is used as manipulator of the tool and a second one is used for manipulating the object. Priority objective in future is the systematic prototyping of CNT-based nanodevices. Special algorithms for real-time processing of noisy SEM images have been implemented and tested. In addition, a 3D graphical user interface has been developed and delivers depth information which is often crucial for teleoperation of nanoobjects due to the lack of depth information in original SEM images. In order to enable automated nanohandling, a new control strategy is proposed. One key challenge for a successful automation is continuous pose estimation of tool and object which can be solved by applying the developed 2D and 3D tracking algorithms. The functionality of the robot cell is exemplified by handling and mechanical characterization of carbon nanotubes (CNTs).

[1]  David J. Fleet,et al.  Phase-based disparity measurement , 1991, CVGIP Image Underst..

[2]  Mark J. Dyer,et al.  Three-dimensional manipulation of carbon nanotubes under a scanning electron microscope , 1999 .

[3]  Richard Martel,et al.  Manipulation of Individual Carbon Nanotubes and Their Interaction with Surfaces , 1998 .

[4]  Sergej Fatikow,et al.  A carbon nanofibre scanning probe assembled using an electrothermal microgripper , 2007 .

[5]  Rolf D. Henkel,et al.  Fast Stereovision by Coherence Detection , 1997, CAIP.

[6]  Milan Sonka,et al.  Image Processing, Analysis and Machine Vision , 1993, Springer US.

[7]  L. Reimer.  Scanning Electron Microscopy: Physics of Image Formation and Microanalysis , 1984 .

[8]  Seung Yol Jeong,et al.  Nanomanipulator-assisted fabrication and characterization of carbon nanotubes inside scanning electron microscope. , 2005, Micron.

[9]  I. Ohzawa,et al.  Stereoscopic depth discrimination in the visual cortex: neurons ideally suited as disparity detectors. , 1990, Science.

[10]  Gehan A. J. Amaratunga,et al.  Plasma enhanced chemical vapour deposition carbon nanotubes/nanofibres—how uniform do they grow? , 2003 .

[11]  Sergej Fatikow,et al.  Microrobot System for Automatic Nanohandling Inside a Scanning Electron Microscope , 2006, IEEE/ASME Transactions on Mechatronics.

[12]  Ole Hansen,et al.  Electro-thermally actuated microgrippers with integrated force-feedback , 2005 .

[13]  T. Belin,et al.  Characterization methods of carbon nanotubes : a review. , 2005 .

[14]  Rolf D. Henkel.  Synchronization, Coherence-Detection and Three-Dimensional Vision , 2000 .

[15]  S. Iijima.  Helical microtubules of graphitic carbon , 1991, Nature.

[16]  Russell M. Taylor,et al.  Controlled placement of an individual carbon nanotube onto a microelectromechanical structure , 2002 .

[17]  E H Adelson,et al.  Spatiotemporal energy models for the perception of motion. , 1985, Journal of the Optical Society of America. A, Optics and image science.

[18]  Tsu-Wei Chou,et al.  Elastic moduli of multi-walled carbon nanotubes and the effect of van der Waals forces , 2003 .

[19]  Seiji Akita,et al.  Nanoengineering of carbon nanotubes for nanotools , 2003 .

[20]  Steven W. Smith,et al.  The Scientist and Engineer's Guide to Digital Signal Processing , 1997 .

[21]  Z. C. Tu,et al.  Single-walled and multiwalled carbon nanotubes viewed as elastic tubes with the effective Young's moduli dependent on layer number , 2001, cond-mat/0112454.

[22]  Sergej Fatikow,et al.  Visual servoing of a mobile microrobot inside a scanning electron microscope , 2005, 2005 IEEE/RSJ International Conference on Intelligent Robots and Systems.

[23]  Ohmi Fuchiwaki,et al.  Precise automatic guiding and positioning of micro robots with a fine tool for microscopic operations , 2004, 2004 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS) (IEEE Cat. No.04CH37566).

[24]  David J. Fleet,et al.  Neural encoding of binocular disparity: Energy models, position shifts and phase shifts , 1996, Vision Research.

[25]  J. Daugman.  Uncertainty relation for resolution in space, spatial frequency, and orientation optimized by two-dimensional visual cortical filters. , 1985, Journal of the Optical Society of America. A, Optics and image science.

[26]  Hideki Hashimoto,et al.  Tele-nanorobotics using an atomic force microscope as a nanorobot and sensor , 1998, Adv. Robotics.

[27]  Fumihito Arai,et al.  Assembly of nanodevices with carbon nanotubes through nanorobotic manipulations , 2003, Proc. IEEE.

[28]  Sergej Fatikow,et al.  Assembly inside a Scanning Electron Microscope using Electron Beam induced Deposition , 2006, 2006 IEEE/RSJ International Conference on Intelligent Robots and Systems.

[29]  Robert W. Stark,et al.  Nanomanipulation by Atomic Force Microscopy , 2005 .

[30]  J T L Thong,et al.  Automatic integrated circuit die positioning in the scanning electron microscope. , 2002, Scanning.