A study on the fabrication of main scale of linear encoder using continuous roller imprint method
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Long Feng | Hongzhong Liu | Lei Yin | Shanjin Fan | Yongsheng Shi | L. Feng | Hongzhong Liu | L. Yin | Shanjin Fan | Yongsheng Shi
[1] Fei-Bin Hsiao,et al. Fabrication of seamless roller molds using step-and-rotate curved surface photolithography and application on micro-lens array optic film , 2011, 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems.
[2] Fei-Bin Hsiao,et al. Fabrication of seamless patterns onto metal rollers by photolithography , 2010, 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems.
[3] Yoshikazu Arai,et al. Design and construction of a two-degree-of-freedom linear encoder for nanometric measurement of stage position and straightness , 2010 .
[4] Stephen Y. Chou,et al. Imprint of sub-25 nm vias and trenches in polymers , 1995 .
[5] S. Chou,et al. Imprint Lithography with 25-Nanometer Resolution , 1996, Science.
[6] Wolfgang Osten,et al. Diffractive incremental and absolute coding principle for optical rotary sensors. , 2011, Applied Optics.