Optical measurement of exposure depth and refractive index in positive photoresists
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L. Escoubas | G. Berginc | F. Flory | J. L. Rouzo | V. Brissonneau | Thomas Wood | J. Brückner | J. Rouzo
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L. Escoubas | G. Berginc | F. Flory | J. L. Rouzo | V. Brissonneau | Thomas Wood | J. Brückner | J. Rouzo