Solid solubilities of impurity elements in germanium and silicon

The available data on solid solubilities of impurity elements in germanium and silicon are summarized in the form of solidus or solvus curves. New solubility data are presented for the lead-germanium, zinc-germanium, indium-germanium, antimony-silicon, gallium-silicon and aluminum-silicon systems. The correlation of the solid solubilities with the heats of sublimation and the atom sizes of the impurity elements is considered.

[1]  W. W. Tyler.  Deep level impurities in germanium , 1959 .

[2]  C. B. Collins,et al.  Properties of Silicon Doped with Iron or Copper , 1957 .

[3]  H. Woodbury,et al.  Properties of Germanium Doped with Iron. I. Electrical Conductivity , 1954 .

[4]  E. Pell.  Solubility of lithium in silicon , 1957 .

[5]  G. L. Pearson,et al.  Electrical Properties of Pure Silicon and Silicon Alloys Containing Boron and Phosphorus , 1949 .

[6]  C. S. Fuller,et al.  Diffusivity and Solubility of Copper in Germanium , 1954 .

[7]  W. C. Dunlap,et al.  Gold as an Acceptor in Germanium , 1955 .

[8]  R. Newman,et al.  Properties of Germanium Doped with Nickel , 1955 .

[9]  J. Burton.  Impurity centers in Ge and Si , 1954 .

[10]  R. Hall.  Variation of the distribution coefficient and solid solubility with temperature , 1957 .

[11]  H. Woodbury,et al.  Scattering of Carriers from Doubly Charged Impurity Sites in Germanium , 1956 .

[12]  C. S. Fuller,et al.  The effect of ion pair and ion triplet formation on the solubility of lithium in germanium—effect of gallium and zinc , 1958 .

[13]  H. E. Bridgers,et al.  Distribution Coefficient of Boron in Germanium , 1956 .

[14]  F. Trumbore.  Solid Solubilities and Electrical Properties of Tin in Germanium Single Crystals , 1956 .

[15]  K. Weiser.  Theoretical calculation of distribution coefficients of impurities in germanium and silicon, heats of solid solution , 1958 .

[16]  C. S. Fuller,et al.  Chemical interactions among defects in germanium and silicon , 1956 .

[17]  H. J. Hrostowski,et al.  The solubility of oxygen in silicon , 1959 .

[18]  F. H. Horn,et al.  Gold as a Donor in Silicon , 1954 .

[19]  R. Carlson.  Properties of Silicon Doped with Manganese , 1956 .

[20]  M. B. Prince,et al.  Drift Mobilities in Semiconductors. I. Germanium , 1953 .

[21]  J. Maserjian,et al.  Semiconductor Properties of Recrystallized Silicon in Aluminum Alloy Junction Diodes , 1957 .

[22]  C. B. Collins,et al.  Properties of Gold-Doped Silicon , 1957 .

[23]  E. D. Kolb,et al.  Distribution of Solute in Crystals Grown from the Melt. Part II. Experimental , 1953 .

[24]  C. D. Thurmond,et al.  Nitrogen in Silicon , 1959 .

[25]  Floating Crucible Technique for Growing Uniformly Doped Crystals , 1958 .

[26]  J. W. Dunlap.  Properties of Zinc-, Copper-, and Platinum-Doped Germanium , 1954 .

[27]  G. Backenstoss,et al.  Conductivity Mobilities of Electrons and Holes in Heavily Doped Silicon , 1957 .

[28]  F. Trumbore,et al.  On the Melting Point of Germanium. , 1955 .

[29]  W. Klemm,et al.  Über Zweistoffsysteme mit Germanium. I. Germanium/Aluminium, Germanium/Zinn und Germanium/Silicium , 1939 .

[30]  H. Woodbury,et al.  Properties of Germanium Doped with Manganese , 1955 .

[31]  J. A. James,et al.  Radiochemical Analysis of Silicon , 1957 .

[32]  C. S. Fuller,et al.  Comparison of radio-copper and hole concentrations in germanium☆ , 1958 .

[33]  F. Trumbore,et al.  Resistivities and Hole Mobilities in Very Heavily Doped Germanium , 1958 .

[34]  J. Kennedy,et al.  Diffusion of Radioactive Antimony in Silicon , 1959 .

[35]  D. Navon,et al.  Retrograde Solubility of Aluminum in Silicon , 1957 .

[36]  F. H. Horn,et al.  Densitometric and Electrical Investigation of Boron in Silicon , 1955 .

[37]  C. D. Thurmond,et al.  Germanium Solidus Curves , 1956 .

[38]  F. Trumbore,et al.  On the Germanium-Silicon phase diagram , 1955 .

[39]  C. S. Fuller,et al.  Solubility of Lithium in Doped and Undoped Silicon, Evidence for Compound Formation , 1956 .

[40]  G. Wertheim.  Recombination Properties of Nickel in Germanium , 1959 .

[41]  J. Struthers.  Solubility and Diffusivity of Gold, Iron, and Copper in Silicon , 1956 .

[42]  E. Pell.  Solubility of Lithium in germanium , 1957 .

[43]  R. N. Hall,et al.  Segregation of Impurities During the Growth of Germanium and Silicon , 1953 .

[44]  R. Carlson,et al.  Double-Acceptor Behavior of Zinc in Silicon , 1957 .

[45]  H. Woodbury,et al.  Triple Acceptors in Germanium , 1957 .

[46]  C. D. Thurmond.  Equilibrium Thermochemistry of Solid and Liquid Alloys of Germanium and of Silicon. I. The Solubility of Ge and Si in Elements of Groups III, IV and V , 1953 .

[47]  C. Isenberg,et al.  On the temperature-dependence of the distribution coefficient: The solid solubilities of tin in silicon and germanium , 1959 .

[48]  C. D. Thurmond,et al.  Equalibrium Thermochemistry of Solid and Liquid Alloys of Germanium and of Silicon. II. The Retrograde Solid Solubilities of Sb in Ge, Cu in Ge and Cu in Si , 1953 .

[49]  C. S. Fuller,et al.  Solubility of Lithium in Silicon , 1957 .

[50]  C. S. Fuller,et al.  Diffusion and Electrical Behavior of Zinc in Silicon , 1957 .

[51]  R. Hall,et al.  Sulfur in silicon , 1959 .

[52]  R. C. Miller,et al.  Diffusion of Aluminum in Single Crystal Silicon , 1956 .