论文信息 - Annealing ambient on the evolution of He-induced voids in silicon - 字舞流文

Annealing ambient on the evolution of He-induced voids in silicon

C. H. Zhang | Y. Zhang | Lijing Han | Yuguo Yang | L. Q. Zhang | Lixing Zhou | B. Li | Yurong Zhong | Huixiao Zhang | Dailian Wang | C. Zhang