Toward over unity proton sputtering yields from a hydrogen-terminated Si(111) 1×1 surface irradiated by slow highly charged Xe ions

The emission of sputtered ions from a hydrogen-terminated Si(111) 1×1 surface has been measured for impact of slow (v<0.25vBohr) highly charged Xe ions. Proton sputtering yields increase strongly with projectile charge q (qγ;γ∼4) and reach to the value greater than one for Xeq+ impact (q≧44). Yields of Si+ remain constant (∼0.1) for lower q (14≦q≦29) but increase with q for higher q region which shows that the apparent Coulomb explosion-like potential sputtering might set in and enhances the sputtering yield drastically over q=29.

[1]  F. Currell.  The Physics of Multiply and Highly Charged Ions , 2003 .

[2]  H. Torii,et al.  Potential sputtering of proton from hydrogen-terminated Si(100) surfaces induced with slow highly charged ions , 2002 .

[3]  M. Gros-Jean,et al.  Oxide nanodots and ultrathin layers fabricated on silicon using nonfocused multicharged ion beams , 2000 .

[4]  F. Currell,et al.  Characteristics of the beam line at the Tokyo electron beam ion trap , 2000 .

[5]  A. Hamza,et al.  Interaction of slow, very highly charged ions with surfaces , 1999 .

[6]  M. Briere,et al.  Electronic Sputtering of Thin Conductors by Neutralization of Slow Highly Charged Ions , 1997 .

[7]  A. Arnau,et al.  Interaction of slow multicharged ions with solid surfaces , 1997 .

[8]  Yamazaki,et al.  Above-surface potential sputtering of protons by highly charged ions. , 1996, Physical review. A, Atomic, molecular, and optical physics.

[9]  F. Currell,et al.  A new versatile electron-beam ion trap , 1996 .

[10]  K. Ueda.  Electron-stimulated desorption study of an atomic hydrogen-adsorbed FZ-Si(100) surface , 1996 .

[11]  K. Ueda,et al.  Surfactant effect of hydrogen for nickel growth on Si(111)7 × 7 surface , 1996 .

[12]  Seiji J. Yamamoto,et al.  Surface Reaction Induced by Multiply-Charged Ions , 1994 .

[13]  Armstrong,et al.  Multiply ionized atom production in keV-N+-Si-surface scattering. , 1993, Physical review. B, Condensed matter.

[14]  S. Della-Negra,et al.  Emission of hydrogen ions under multiply charged ion bombardment , 1992 .

[15]  Joret,et al.  Secondary ion emission induced by multicharged 18-keV ion bombardment of solid targets. , 1988, Physical review letters.

[16]  K. A. Smith,et al.  Absolute and angular efficiencies of a microchannel-plate position-sensitive detector , 1984 .