Design Methodology and Optimization of Distributed MEMS Matching Networks for Low-Microwave-Frequency Applications

A design methodology for the distributed microelectromechanical system (MEMS) impedance matching networks based on the optimization of the uniformity of the Smith chart coverage has been developed. The proposed approach was validated through a comparison between a traditional coplanar waveguide (CPW) design and an improved design based on a slow-wave (SW) structure. The enhanced reconfigurable impedance matching network has been developed for low-frequency applications. The network is based on a distributed MEMS transmission line (DMTL) coupled with the SW structure to reduce the total physical length of the network by 25% in comparison with a traditional DMTL. An extensive analysis was performed to identify the impact of each design parameter in order to optimize the structure and reduce the required size for relatively low-frequency applications. Several parameters are extracted from the electromagnetic simulation results and are used to design the proposed impedance matching network. Measurement results confirm the efficiency of the proposed design methodology in improving the impedance coverage and also miniaturization of the DMTL impedance matching networks.

[1]  Gabriel M. Rebeiz,et al.  A 20-50 GHz RF MEMS single-stub impedance tuner , 2005, IEEE Microwave and Wireless Components Letters.

[2]  Gabriel M. Rebeiz,et al.  RF MEMS Impedance Tuners for 6-24 GHz Applications , 2007 .

[3]  T. Weller,et al.  Miniaturized slow-wave coplanar waveguide circuits on high-resistivity silicon , 2002, 2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278).

[4]  Gabriel M. Rebeiz,et al.  A 20-50 GHz reconfigurable matching network for power amplifier applications , 2004, 2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535).

[5]  D. Peroulis,et al.  A novel MEMS impedance tuner simultaneously optimized for maximum impedance range and power handling , 2005, IEEE MTT-S International Microwave Symposium Digest, 2005..

[6]  Gabriel M. Rebeiz,et al.  Optimization of distributed MEMS transmission-line phase shifters-U-band and W-band designs , 2000 .

[7]  Gabriel M. Rebeiz.  RF MEMS: Theory, Design and Technology , 2003 .

[8]  N.S. Barker,et al.  Distributed MEMS tunable matching network using minimal-contact RF-MEMS varactors , 2006, IEEE Transactions on Microwave Theory and Techniques.

[9]  J. J. Komo,et al.  Multi-dimensional uniformity of portable pseudo-random number generators , 1990, [1990] Proceedings. The Twenty-Second Southeastern Symposium on System Theory.

[10]  R. R. Mansour,et al.  A novel reconfigurable impedance matching network using DGS and MEMS switches for millimeter-wave applications , 2008, 2008 IEEE MTT-S International Microwave Symposium Digest.

[11]  G.M. Rebeiz,et al.  W-band RF MEMS double and triple-stub impedance tuners , 2005, IEEE MTT-S International Microwave Symposium Digest, 2005..

[12]  Youngwoo Kwon,et al.  Low-loss analog and digital micromachined impedance tuners at the Ka-band , 2001 .

[13]  Gabriel M. Rebeiz,et al.  A reconfigurable 6-20 GHz RF MEMS impedance tuner , 2004, 2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535).

[14]  John Papapolymerou,et al.  Reconfigurable double-stub tuners using MEMS switches for intelligent RF front-ends , 2003 .

[15]  Raafat R. Mansour,et al.  Improved distributed mems matching network for low frequency applications using a slow-wave structure , 2008, 2008 IEEE MTT-S International Microwave Symposium Digest.

[16]  Gabriel M. Rebeiz,et al.  A 4-18-GHz reconfigurable RF MEMS matching network for power amplifier applications: Reconfigurable RF MEMS Matching Network , 2004 .

[17]  Gabriel M. Rebeiz,et al.  A 4–18-GHz reconfigurable RF MEMS matching network for power amplifier applications , 2004 .