A six-component silicon micro force sensor

A six-component micro force sensor has been developed using silicon micromachining technology. The sensing and elastic elements of the sensor are fabricated separately through bulk silicon machining processes and bonded together using a Si-Au eutectic bonding technique. Calibration of the sensor is undertaken using Lorentz forces. High resolution and satisfactory linearity of the outputs of the sensor are obtained.

[1]  Hua-Tay Lin,et al.  Research on MR-2 micro-robot , 1994, Proceedings of 1994 IEEE International Conference on Industrial Technology - ICIT '94.

[2]  J Planert,et al.  A miniaturised force-torque sensor with six degrees of freedom for dental measurements. , 1992, Clinical physics and physiological measurement : an official journal of the Hospital Physicists' Association, Deutsche Gesellschaft fur Medizinische Physik and the European Federation of Organisations for Medical Physics.

[3]  Fumihito Arai,et al.  Steering mechanism and swimming experiment of micro mobile robot in water , 1995, Proceedings IEEE Micro Electro Mechanical Systems. 1995.

[4]  C. D. Mote,et al.  A novel silicon sensing element for high-natural-frequency, low-range dynamometrical sensors , 1998 .