A six-component silicon micro force sensor
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[1] Hua-Tay Lin,et al. Research on MR-2 micro-robot , 1994, Proceedings of 1994 IEEE International Conference on Industrial Technology - ICIT '94.
[2] J Planert,et al. A miniaturised force-torque sensor with six degrees of freedom for dental measurements. , 1992, Clinical physics and physiological measurement : an official journal of the Hospital Physicists' Association, Deutsche Gesellschaft fur Medizinische Physik and the European Federation of Organisations for Medical Physics.
[3] Fumihito Arai,et al. Steering mechanism and swimming experiment of micro mobile robot in water , 1995, Proceedings IEEE Micro Electro Mechanical Systems. 1995.
[4] C. D. Mote,et al. A novel silicon sensing element for high-natural-frequency, low-range dynamometrical sensors , 1998 .