X-ray and infrared spectroscopy of layers produced by cosputtering of spatially separated SiO2 and Si sources
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V. I. Aksenova | I. Balberg | V. R. Galakhov | S. N. Shamin | V. Volodin | I. Antonova | E. Savir | J. Jedrzejewski | Z. Yanovitskaya | A. N. Karpov | N. L. Shvartz | T. Ezhevskaya