Inkjet Printing of Plate Acoustic Wave Devices

In the paper, the results of production of Ag inkjet printed interdigital transducers to the acoustic delay line based on Y-cut X-propagation direction of lithium niobate plate for the frequency range from 1 to 14 MHz are presented. Additionally, morphological, structural, and electro-physical characteristics of the obtained electrodes were investigated. Mathematical modeling of the excitation of acoustic waves by these electrode structures was carried out. Comparison of the theoretical results with experimental ones showed their qualitative and quantitative coincidences. It was shown that conventional inkjet printing can replace the complex photolithographic method for production of interdigital transducers for acoustic delay lines working up to 14 MHz. The resulting electrode structures make it possible to efficiently excite acoustic waves with a high value of electromechanical coupling coefficient in piezoelectric plates.

[1]  Jun Yeob Song,et al.  High‐Resolution Printing of 3D Structures Using an Electrohydrodynamic Inkjet with Multiple Functional Inks , 2015, Advanced materials.

[2]  J. Lewis,et al.  3D Printing of Interdigitated Li‐Ion Microbattery Architectures , 2013, Advanced materials.

[3]  William M. Gelbart,et al.  Thermodynamic Control of Gold Nanocrystal Size: Experiment and Theory , 1995 .

[4]  S. Joshi,et al.  Investigation of acoustic waves of higher order propagating in plates of lithium niobate. , 2004, Ultrasonics.

[5]  B. Zaitsev,et al.  The biological acoustic sensor to record the interactions of the microbial cells with the phage antibodies in conducting suspensions. , 2018, Talanta.

[6]  Andrey L. Stepanov,et al.  Modification of ion-synthesized silver nanoparticles in glass by high-power excimer laser pulses , 2008 .

[7]  D. A. Ryndin,et al.  Heterojunction solar cells based on single-crystal silicon with an inkjet-printed contact grid , 2017 .

[8]  Alexander Bergmann,et al.  NO2 and NH3 Sensing Characteristics of Inkjet Printing Graphene Gas Sensors , 2019, Sensors.

[9]  Shaorong Sun,et al.  Super high sensitive plate acoustic wave humidity sensor based on graphene oxide film , 2017, Ultrasonics.

[10]  John A Rogers,et al.  High-resolution electrohydrodynamic jet printing. , 2007, Nature materials.

[11]  Chia-Chen Li,et al.  Effects of capping agents on the dispersion of silver nanoparticles , 2013 .

[12]  K. Murata,et al.  Super inkjet printer technology and its properties , 2011 .

[13]  Yong Wang,et al.  High-temperature high-sensitivity AlN-on-SOI Lamb wave resonant strain sensor , 2018, AIP Advances.

[14]  Iren Kuznetsova,et al.  Acoustic Waves in Thin Plates of Lithium Niobate , 2000 .

[15]  Xiuwei Xuan,et al.  The printed Surface Acoustic Wave filter with inkjet technology , 2014, 2014 IEEE International Conference on Electron Devices and Solid-State Circuits.

[16]  V V Kolesov,et al.  Plate acoustic wave sensor for detection of small amounts of bacterial cells in micro-litre liquid samples. , 2015, Ultrasonics.

[17]  Ulrich S. Schubert,et al.  Progress of alternative sintering approaches of inkjet-printed metal inks and their application for manufacturing of flexible electronic devices , 2014 .

[18]  David Morgan,et al.  Surface-wave devices for signal processing , 1985 .

[19]  S. Bogatyrenko,et al.  Melting temperature of nanoparticles and the energy of vacancy formation in them , 2010 .

[20]  Dominique Chatain,et al.  Wetting and Interfaces in Metal-Oxide Systems: Sensitivity to Experimental Conditions , 1998 .

[21]  Shlomo Magdassi,et al.  Silver Nanoparticles as Pigments for Water-Based Ink-Jet Inks , 2003 .

[22]  Cinzia Caliendo,et al.  Longitudinal Modes along Thin Piezoelectric Waveguides for Liquid Sensing Applications , 2015, Sensors.

[23]  Ronn Andriessen,et al.  High efficiency, fully inkjet printed organic solar cells with freedom of design , 2015 .

[24]  Masahiko Fujii.  Issues and Approaches Imposed on Ink Jet Technologies for the Progress of Printed Electronics , 2010 .

[25]  Wolfgang Clemens,et al.  OE-A Roadmap for Organic and Printed Electronics , 2013 .

[26]  Vivek Subramanian,et al.  Plastic-Compatible Low Resistance Printable Gold Nanoparticle Conductors for Flexible Electronics , 2003 .

[27]  Shixuan Du,et al.  Increase in thermal stability induced by organic coatings on nanoparticles , 2004 .

[28]  Milica Jović,et al.  Analytical sensing platforms with inkjet printed electrodes , 2016 .

[29]  T. C. Green,et al.  Shape-Controlled Synthesis of Colloidal Platinum Nanoparticles , 1996, Science.

[30]  Alfred Binder,et al.  Exploiting the combination of 3D polymer printing and inkjet Ag-nanoparticle printing for advanced packaging , 2017 .

[31]  S. Magdassi,et al.  Copper Nanoparticles for Printed Electronics: Routes Towards Achieving Oxidation Stability , 2010, Materials.

[32]  Siegfried Menzel,et al.  Additive manufacturing of 96 MHz surface acoustic wave devices by means of superfine inkjet printing , 2018, Smart Materials and Structures.

[33]  Enrico Verona,et al.  Gasoline identifier based on SH0 plate acoustic waves. , 2016, Ultrasonics.

[34]  Sungjoon Lim,et al.  Review of Recent Inkjet-Printed Capacitive Tactile Sensors , 2017, Sensors.

[35]  D. Poulikakos,et al.  Electrohydrodynamic NanoDrip Printing of High Aspect Ratio Metal Grid Transparent Electrodes , 2016 .

[36]  S. Joshi,et al.  Effect of a liquid on the characteristics of antisymmetric lamb waves in thin piezoelectric plates , 2007 .

[37]  Konrad Walus,et al.  Inkjet Printed All-Polymer Flexural Plate Wave Sensors , 2013, IEEE Sensors Journal.

[38]  Florin Udrea,et al.  Inkjet-printed CMOS-integrated graphene–metal oxide sensors for breath analysis , 2019, npj 2D Materials and Applications.

[39]  P. W. Bridgman.  The Electrical Resistance of Metals. , 1921 .

[40]  K. Walus,et al.  Inkjet printed all-polymer flexural plate wave sensors , 2013, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).

[41]  Muhammad Hamidullah,et al.  Amorphous SiC/c-ZnO-Based Quasi-Lamb Mode Sensor for Liquid Environments , 2017, Sensors.

[42]  Stephan Kirchmeyer,et al.  The OE-A roadmap for organic and printed electronics: creating a guidepost to complex interlinked technologies, applications and markets , 2016 .