论文信息 - Hybrid integration of modified uni-traveling carrier photodiodes on a multi-layer silicon nitride platform using total internal reflection mirrors

Hybrid integration of modified uni-traveling carrier photodiodes on a multi-layer silicon nitride platform using total internal reflection mirrors

We demonstrate hybrid integration of modified uni-traveling carrier photodiodes on a multi-layer silicon nitride platform using total internal reflection mirrors. Low-loss high-efficiency coupling of InGaAs detector on a silicon substrate has been realized.

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