NIST VUV metrology programs to support space-based research

Abstract Vacuum ultraviolet (VUV) radiation, spanning the electromagnetic spectrum from about 2 nm (620 eV) to 200 nm (6.2 eV) has long been important in astronomy, solar physics, and Earth observing systems, among other applications. The National Institute of Standards and Technology (NIST) has several programs to serve the VUV user community, from the Synchrotron Ultraviolet Radiation Facility (SURF III) – a standard of irradiance from 2 to 400 nm – to measurement and calibration services for mirrors, photodiodes, and filters. We have recently reduced the uncertainty of our extreme ultraviolet (EUV) detector calibrations by implementing an absolute cryogenic radiometer on one of the SURF beamlines, and have effected several improvements to the EUV detector calibration beamline at SURF. We continue to investigate wide-bandgap semiconductors for use as solar-blind detector technologies, and have recently obtained quantum efficiency and uniformity data from 1 cm 2 active area GaN and SiC photodiodes.

[1]  James A. R. Samson Absolute Intensity Measurements in the Vacuum Ultraviolet , 1964 .

[2]  L. R. Canfield,et al.  Silicon photodiodes with integrated thin-film filters for selective bandpasses in the extreme ultraviolet , 1994, Optics & Photonics.

[3]  L. Canfield New far UV detector calibration facility at the National Bureau of Standards. , 1987, Applied optics.

[4]  R. P. Madden,et al.  Synchrotron ultraviolet radiation facility (SURF II) radiometric instrumentation calibration facility , 1993 .

[5]  Steven Grantham,et al.  Response of a silicon photodiode to pulsed radiation. , 2003, Applied optics.

[6]  Robert E. Vest,et al.  Towards High Accuracy Reflectometry for Extreme-Ultraviolet Lithography , 2003, Journal of research of the National Institute of Standards and Technology.

[7]  Robert E. Vest,et al.  A simple transfer-optics system for an extreme-ultraviolet synchrotron beamline , 2005 .

[8]  Andrei Osinsky,et al.  Electron beam-induced increase of electron diffusion length in p-type GaN and AlGaN/GaN superlattices , 2000 .

[9]  R. Korde,et al.  Stability and quantum efficiency performance of silicon photodiode detectors in the far ultraviolet. , 1989, Applied optics.

[10]  Stanley S. Ballard,et al.  Techniques of Vacuum Ultraviolet Spectroscopy , 1967 .

[11]  L. R. Canfield,et al.  Photoemission from Silicon Photodiodes and Induced Changes in the Detection Efficiency in the Far Ultraviolet , 1997 .

[12]  Ping-Shine Shaw,et al.  Stability of photodiodes under irradiation with a 157-nm pulsed excimer laser. , 2005, Applied optics.

[13]  Steven W. Brown,et al.  The New Ultraviolet Spectral Responsivity Scale Based on Cryogenic Radiometry at Synchrotron Ultraviolet Radiation Facility III , 2001 .

[14]  J. Cable,et al.  One gigarad passivating nitrided oxides for 100% internal quantum efficiency silicon photodiodes , 1993 .

[15]  U Arp,et al.  Ultraviolet radiometry with synchrotron radiation and cryogenic radiometry. , 1999, Applied optics.

[16]  Robert E. Vest,et al.  Large area GaN Schottky photodiode with low leakage current , 2004 .

[17]  Thomas B. Lucatorto,et al.  First results from the updated NIST/DARPA EUV reflectometry facility , 2002, SPIE Advanced Lithography.

[18]  T. A. Callcott,et al.  Variable groove spaced grating monochromators for synchrotron light sources , 1994 .

[19]  James A. R. Samson,et al.  Absolute photon-flux measurements in the vacuum ultraviolet , 1974 .

[20]  R. Gupta,et al.  New ultraviolet radiometry beamline at the Synchrotron Ultraviolet Radiation Facility at NIST , 1998 .

[21]  B. Fleck,et al.  SOHO: The Solar and Heliospheric Observatory , 1995 .

[22]  P. Wurz,et al.  In-flight comparisons of solar EUV irradiance measurements provided by the CELIAS/SEM on SOHO , 2002 .

[23]  Howard Milchberg,et al.  Characterization of a cryogenic, high-pressure gas jet operated in the droplet regime , 2002 .

[24]  V. Domingo,et al.  The SOHO mission: An overview , 1995 .