Improved PID algorithms with application to excimer laser temperature control

The stability of temperature in the chamber of excimer laser has a great effect on working performance of the excimer especially for the energy stability and useful life. So it is very important to keep the chamber temperature constantly. Based on that, a high precision temperature control system of excimer laser and two improved PID control algorithms were designed. Experimental results indicate that the designed system runs reliably and has superior control precision which provides a favorable temperature environment for the laser's operation.

[1]  Hu Yueming,et al.  On PID controllers based on simulated annealing algorithm , 2008, 2008 27th Chinese Control Conference.

[2]  Yakov Frayman,et al.  A dynamically generated fuzzy neural network and its application to torsional vibration control of tandem cold rolling mill spindles , 2002 .

[3]  Chien-Liang Lai,et al.  Design the Remote Control System With the Time-Delay Estimator and the Adaptive Smith Predictor , 2010, IEEE Transactions on Industrial Informatics.

[4]  V. J. Poorani,et al.  Comparison of PID controller and Smith predictor controller for heat exchanger , 2013, 2013 IEEE International Conference ON Emerging Trends in Computing, Communication and Nanotechnology (ICECCN).

[5]  Hong Chen,et al.  An improved expert intelligent PID algorithm in AQM network , 2010, 2010 International Conference on Computer, Mechatronics, Control and Electronic Engineering.

[6]  Xu Hao,et al.  Pitch control of large scale wind turbine based on expert PID control , 2011, 2011 International Conference on Electronics, Communications and Control (ICECC).

[7]  Chih-Min Lin,et al.  Supervisory recurrent fuzzy neural network control of wing rock for slender delta wings , 2004, IEEE Trans. Fuzzy Syst..

[8]  D. Saez,et al.  Design of fuzzy model based predictive controllers and its application to an inverted pendulum , 1997, Proceedings of 6th International Fuzzy Systems Conference.

[9]  Ivan Ganchev,et al.  Fuzzy PID control of nonlinear plants , 2002, Proceedings First International IEEE Symposium Intelligent Systems.

[10]  Peng Xiaohong,et al.  Research and Application on GA-Based Two-Stage Fuzzy Temperature Control System for a Type of Industrial Furnace , 2010, 2010 International Conference on Electrical and Control Engineering.

[11]  Cheng Shao,et al.  HSIC PID Controller and Its Application , 2006, 2006 6th World Congress on Intelligent Control and Automation.

[12]  Huixia Liu,et al.  Research on identification algorithm of Hammerstein model , 2010, 2010 IEEE Fifth International Conference on Bio-Inspired Computing: Theories and Applications (BIC-TA).