2D visual micro-position measurement based on intertwined twin-scale patterns

Abstract Position measurement at nanoscale currently raises issues such as making significant compromise between range and resolution or as the difficulty to measure several directions with a single sensor. This paper presents a novel visual method to measure displacements at nanometric scale along two axes. This method allows subpixelic measurement of position by using a pseudo-periodic pattern observed by a regular visual setup. This micrometric pattern corresponds to the intertwining of two perpendicular copies of a single-axis pattern made of two frequency carriers with slightly different periods. It was realized in clean room by photolythography of aluminium on glass. The algorithm is based on a twin-scale principle, itself based on direct phase measurement of periodic grids. Experiments are performed at video rate (30 fps) and show a linearity below 0.16% and a repeatability below 14 nm over an unambiguous range of 221 μm. A resolution below 0.5 nm is demonstrated by the use of 2000 images. The method can be adjusted to different ranges, according to the needs.

[1]  Wei Huang,et al.  Displacement measurement with nanoscale resolution using a coded micro-mark and digital image correlation , 2014 .

[2]  E. Sarajlic,et al.  Subpixel translation of MEMS measured by discrete fourier transform analysis of CCD images , 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.

[3]  Xianmin Zhang,et al.  Micro-vision-based displacement measurement with high accuracy , 2011, International Symposium on Precision Engineering Measurement and Instrumentation.

[4]  Patrick Sandoz,et al.  Subpixelic Measurement of Large 1D Displacements: Principle, Processing Algorithms, Performances and Software , 2014, Sensors.

[5]  Nicholas G. Dagalakis,et al.  Design of MEMS vision tracking system based on a micro fiducial marker | NIST , 2015 .

[6]  K. Creath.  Step height measurement using two-wavelength phase-shifting interferometry. , 1987, Applied optics.

[7]  Max Born,et al.  Principles of optics - electromagnetic theory of propagation, interference and diffraction of light (7. ed.) , 1999 .

[8]  Fumihito Arai,et al.  On-Chip Method to Measure Mechanical Characteristics of a Single Cell by Using Moiré Fringe , 2015, Micromachines.

[9]  Federico Buja,et al.  In-Plane Displacement Detection With Picometer Accuracy on a Conventional Microscope , 2015, Journal of Microelectromechanical Systems.

[10]  Laurent Robert,et al.  Position-referenced microscopy for live cell culture monitoring , 2011, Biomedical optics express.

[11]  Patrick Sandoz,et al.  Vision-Based Microforce Measurement With a Large Range-to-Resolution Ratio Using a Twin-Scale Pattern , 2015, IEEE/ASME Transactions on Mechatronics.

[12]  M. Schmid.  Principles Of Optics Electromagnetic Theory Of Propagation Interference And Diffraction Of Light , 2016 .

[13]  Bijan Shirinzadeh,et al.  A vision-based measurement algorithm for micro/nano manipulation , 2013, 2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics.

[14]  Hiroshi Tsuda,et al.  Accurate full-field optical displacement measurement technique using a digital camera and repeated patterns. , 2014, Optics express.